Semiconductor

Q: What makes Advanced Energy products a trusted choice for demanding semiconductor processes?

With decades of experience in semiconductor power solutions, Advanced Energy sets the benchmark for quality and reliability. Our products are engineered to support diverse process requirements and deliver consistent performance in advanced device manufacturing environments where precision and uptime are critical.

Q: What semiconductor fabrication processes does Advanced Energy provide power solutions for?

Advanced Energy supports a broad range of semiconductor manufacturing processes, including plasma-based etching and deposition, chamber cleaning, temperature control, ion implantation, wafer inspection, and electrostatic chucking. AE power systems are designed to meet the demanding requirements of complex recipes, helping manufacturers achieve high precision, reliability, and throughput.

Q: Why is precision power control important in semiconductor manufacturing?

Precision power control is essential for maintaining process consistency, especially as device geometries shrink and structures become more complex. Advanced Energy delivers industry-leading precision that enables fine-tuned plasma behavior, stable thermal profiles, and repeatable results across wafers. This level of control also supports sophisticated pulsing techniques and real-time diagnostics, which are essential for maximizing yield, reducing variability, and minimizing downtime. Beyond production stability, precise power control accelerates process development by enabling rapid experimentation and optimization. Engineers can confidently adjust parameters, validate new recipes, and scale innovative techniques without compromising uniformity or reliability. This flexibility shortens development cycles, improves time-to-market, and supports continuous innovation in advanced semiconductor processes.

Q: What power delivery challenges do wafer fabrication facilities face?

Wafer fabs face significant reliability challenges. Aging equipment and unpredictable power fluctuations that can disrupt production or damage sensitive tools, while ever-changing requirements for power density and thermal management adds further complexity. These issues are compounded by the need for continuous uptime and extremely tight process tolerances. Advanced Energy understands these challenges and leads the industry in addressing them with robust, intelligent power systems that adapt to dynamic load conditions, help maintain stability, and provide predictive insights to minimize downtime and optimize performance.

Q: How do Advanced Energy solutions address SEMI F47 voltage sag immunity requirements?

Advanced Energy designs its power solutions to comply with SEMI F47 standards, helping equipment tolerate short-term voltage dips without the logic/control shutting down. This includes ride-through capabilities and low total harmonic distortion, which help maintain stable operation during grid disturbances. These features are especially important in fabs where even brief interruptions can lead to significant losses.

Q: Are Advanced Energy power solutions compatible with existing semiconductor equipment?

Many of Advanced Energy’s power solutions are designed with modularity and configurability in mind, allowing integration into a wide variety of existing semiconductor platforms. These include configurable power supplies with multiple DC outputs, flexible input options, and digital communication protocols that support legacy and modern systems alike. However, some advanced technologies, especially those developed for next-generation processes, may require specific platform capabilities or retrofitting to function optimally. Therefore, while AE offers broad support for existing equipment, compatibility should be evaluated on a case-by-case basis depending on the toolset, process requirements, and integration needs.

Advanced Energy leads the market in plasma power delivery, temperature measurement, temperature control, and wafer control technologies for semiconductor manufacturing, including critical etching, deposition, chamber cleaning, inspection, implantation, and annealing. Through strategic partnerships, continuous innovation, and rapid design, we deliver solutions for your specific process requirements.

Semiconductor Applications

Deposition

A comprehensive portfolio for semiconductor deposition, including plasma power delivery, temperature measurement, temperature control, and wafer control solutions.

Etch

High-precision plasma power delivery systems provide exacting control of etch applications for high repeatability and yield.

Electron Beam Inspection

Our products deliver stable, reliable power to electron beam inspection systems. This exacting control enables highly accurate defect identification, ensuring that memory and logic devices meet stringent specifications.

Implant

Our products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.

RF Generator Calibration

Optimize RF generator performance and process stability with Advanced Energy’s Power Meters and Diagnostic Cart for precision calibration.

Strip

Precision control of power in plasma etching is critical to ensure flawless stripping of the wafer surface, leaving it free of any potential defects.

Featured Products

New

Sekidenko 401M Series

Single-Channel Non-Contact Temperature Measurement with Selectable Emissivity

Datasheet

New

Luxtron® M-1200 Fiber Optic Temperature Converter

Accurate, compact Luxtron M-1200 fiber optic temperature sensor

Datasheet

Featured

Opti™ RF Power Rack

Optimized power delivery for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools.

Datasheet

Featured

Omni™ RF Diagnostic Cart

The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes.

Datasheet

Sekidenko 401M Series Datasheet	Thermal Sensing	Single-Channel Non-Contact Temperature Measurement with Selectable Emissivity
Luxtron® M-1200 Fiber Optic Temperature Converter Datasheet	Temperature Sensing	Accurate, compact Luxtron M-1200 fiber optic temperature sensor
Opti™ RF Power Rack Datasheet		Optimized power delivery for 200 mm semiconductor fabs using high-density plasma chemical vapor deposition (HDP/CVD) tools.
Omni™ RF Diagnostic Cart Datasheet	Integrated Systems	The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes.
MAXstream Remote Plasma Source Datasheet	Remote Plasma Sources	Reliable Performance for Chamber Clean Applications
eVerest® RF Generator Datasheet	RF Plasma Generators	Angstrom Era Precision Power
Paramount Plus RF Generator Datasheet	RF Plasma Generators	Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Navigator II Datasheet	RF Match Networks	Rapid, Accurate, and Reliable Digitally-Tuned Matching
NavX™	RF Match Networks	Ultrafast, RF-Synchronized Tuning to Multi-Level Pulse States
Ascent AP Pulsed and DC Power System Datasheet	Pulsed and DC Power Systems	Unprecedented Power Control for Single- and Dual-Magnetron Sputtering
Ascent AMS Pulsed and DC Power System Datasheet	Pulsed and DC Power Systems	Stable Power Delivery for Extreme Arc Conditions and Highly Repeatable Films
Ascent DMS Pulsed and DC Power System Datasheet	Pulsed and DC Power Systems	Advanced Dual-Magnetron Sputtering Accessories
Pinnacle III DC Power Supply Datasheet	Pulsed and DC Power Systems	The Most Recognized DC Power Supply for <= 20 kW Processes
eVoS LE Bias Solution Datasheet	Power Delivery Systems	Asymmetric Bias Waveform Generator for Direct Control of Substrate Voltage and Ion Energy
eVoS ME Bias Solution Datasheet	Power Delivery Systems	The eVoS® platform enables direct control of wafer-surface voltage and ion energy distribution, empowering process engineers to optimize bias performance for specific process results.
Trek 645 Series Datasheet	E-Chuck	Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV
Trek 645-HT Series Datasheet	E-Chuck	Software-Driven Electrostatic Chuck Controller, Output Voltage ±1 kV at 20 mA.
Trek 646 Series Datasheet	E-Chuck	Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV
Trek 2200 Series Datasheet	Systems Up To 5 kV	Cost-Effective, High Performance, Piezo Drivers and High Voltage Amplifiers, 40 W
Trek 623B Series Datasheet	Systems Up To 5 kV	High Voltage Amplifier for Precise Control of Bipolar Output Voltages, 0 to ±2 kV DC or Peak AC
Trek 5/80-HS Series Datasheet	Systems Up To 5 kV	Non-Inverting High Voltage Amplifier, Output Voltage 0 to ±5 kV DC or Peak AC
Trek 30/20A Series Datasheet	Systems Greater than 5 kV	Non-Inverting High Voltage Amplifier, Output Voltage 0 to ±30 kV DC or Peak AC
Trek 158A Series Datasheet	ESD Instrumentation	Compact Charged Plate Monitor for Evaluating Air Ionization System Performance
Trek 370 Series Datasheet	Eletrostatic Voltmeters	Precision, Non-Contact Electrostatic Voltmeter
Trek 520 Series Datasheet	ESD Instrumentation	Hand-Held Electrostatic Voltmeters for ESD Applications
Luxtron® M-1100 Fiber Optic Temperature Converter Datasheet	Thermal Sensing	Fiber optic temperature sensing for semiconductor in etch and deposition applications between -200 to 450C
Sekidenko 4100T Series Datasheet	Thermal Sensing	Multi-Channel, Non-Contact Optical Fiber Temperature Pyrometer with Configurable Wavelength Range
Mikron MCL640 Series Datasheet	Thermal Sensing	High-Performance, Infrared Camera for Temperature Measurement between -40 and 1600°C
NP08 Datasheet	Configurable/Modular Industrial & Medical PSUs	Up to 4000 W Configurable AC-DC Power Supplies
iHP12/15 Air Cooled Datasheet	Configurable/Modular Industrial & Medical PSUs	12k to 15k W Configurable AC-DC Power Supplies
CoolX1800 Datasheet	Configurable/Modular Industrial & Medical PSUs	Up to 1800 W Configurable, Fanless AC-DC Power Supplies
uMP04 Gen II Datasheet	Configurable/Modular Industrial & Medical PSUs	400 to 600 W Configurable AC-DC Power Supplies
AA Series Datasheet	UltraVolt High Voltage PCB Mount	Miniature PCB-Mount, Regulated DC-DC Converters
Thyro-XD™ SCR Power Controller Datasheet	SCR Power Controllers	High-accuracy SCRs with long-term reliability and advanced integration capabilities
Thyro-PX DC Power Controller Datasheet	SCR Power Controllers	Enhanced SCR Power Controller for All DC Rectifier Applications
5540A Series RF Power Meters Datasheet	RF Power Sensing	High Power, High-Accuracy RF Measurement in a Single Instrument