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Paramount Plus RF Generator


Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.


  • Enhanced RF stability with tightly regulated power output
  • Advanced multi-level pulsing
  • Pulse synchronization and monitoring
  • Real-time power and impedance measurement
  • Advanced FastDAQ data acquisition system


  • Precisely control RF
  • Enhance plasma stability
  • Expedite plasma transitions
  • Reduce process times
  • Improve process repeatability and chamber matching


Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 1 to 60 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 5 to 15 kW
Rack Width: Full rack
Height (Inches): 3U, 4U
Communications Interface: RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
Advanced Features: Pulsing, arc management, CEX, MBFT
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Technical Documentation


Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Agreement Term Options

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Agreement Term Options

Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality


Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

24/5 Support Available

Get Expert Advice From Our Engineers

We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
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