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Trek 645-HT Series
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Software-Driven Electrostatic Chuck Controller, Output Voltage Range 0 to ±1 kV
The Trek® 645-HT software-driven electrostatic chuck controller has more current for higher temperature processes. Building on the versatile, trusted performance of the Trek 645 series allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.
Features
- Lockable front panel control interface
- NIST-traceable calibration certificate provided with each unit
- Supports both Coulombic and Johnsen-Rahbek ESC technologies
- Upload and store electrostatic chuck profiles to the unit via the user-friendly software interface
- Wafer detection includes no-wafer, wafer-present, or wafer-clamped status
Benefits
- Increase throughput and eliminate sticky/popping wafer issues
- Adjustable in-process amplitude/offset and output-control versatility
- Configurable for custom clamp/declamp sequences and wave shapes
- Control parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage, and offset voltage
- Parameters can be controlled via the front panel, digital communications interfaces, or analog I/O pins
Specifications
| Output Power (W): | 20 |
|---|---|
| Maximum Output Current (A): | ±0.020 |
| Output Voltage Range (V): | 0 to ±1000 |
Accessories
Trek 645/646 Application Software
Trek 645 and Trek 646 Application Software
Technical Documentation
Product Information Documents
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