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Ascent DMS Pulsed and DC Power System

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Advanced Dual-Magnetron Sputtering Accessories

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation. The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits.

Features

Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron
Advanced process management through a tiered approach to arc mitigation
CEX (phase synchronization)

Benefits

Increased film value: Repeatable, customizable deposited films
Lower cost of ownership and increased productivity
Higher power levels with improved stability and reduced arc damage
Easy scalability, integration, and support
Modular design allows you to pay for only what you need while enabling future capability expansion

Specifications

Cooling:	Hybrid (air and water)
Output Frequency (MHz, kHz):	0.5 to 50 kHz
Input Voltage (V):	100 to 240 VAC
Power Level (kW):	40 to 120 kW
Rack Width:	Full rack
Height (Inches):	6U, 10U
Output Voltage Range (V):	400-1000 V
Communications Interface:	Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
Advanced Features:	Progressive arc management
Process Applications:	Deposition
Ignition Voltage (V):	1200
Compliance:	EU RoHS, CE, NRTL, SEMI S2, SEMI F47

All Specifications Collapse Specifications

Technical Documentation

Title	Type
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	Case Study
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB)	White Paper
Optimizing Static Deposition Processes White Paper (779 KB)	White Paper
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB)	White Paper

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Services

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.