AE offers a comprehensive portfolio for semiconductor deposition, including plasma power delivery, temperature measurement, temperature control, and wafer control solutions.
Advanced Energy's high-precision plasma power delivery systems provide exacting control of etch applications for high repeatability and yield.
Electron Beam Inspection
Advanced Energy delivers stable, reliable power to electron beam inspection systems. This exacting control enables highly accurate defect identification, ensuring that memory and logic devices meet stringent specifications.
AE power products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.
Precision control of power in plasma etching is critical to ensure flawless stripping of the wafer surface, leaving it free of any potential defects.