Semiconductor

With decades of experience in semiconductor power solutions, Advanced Energy sets the benchmark for quality and reliability. Our products are engineered to support diverse process requirements and deliver consistent performance in advanced device manufacturing environments where precision and uptime are critical.

Advanced Energy supports a broad range of semiconductor manufacturing processes, including plasma-based etching and deposition, chamber cleaning, temperature control, ion implantation, wafer inspection, and electrostatic chucking. AE power systems are designed to meet the demanding requirements of complex recipes, helping manufacturers achieve high precision, reliability, and throughput.

Precision power control is essential for maintaining process consistency, especially as device geometries shrink and structures become more complex. Advanced Energy delivers industry-leading precision that enables fine-tuned plasma behavior, stable thermal profiles, and repeatable results across wafers. This level of control also supports sophisticated pulsing techniques and real-time diagnostics, which are essential for maximizing yield, reducing variability, and minimizing downtime. Beyond production stability, precise power control accelerates process development by enabling rapid experimentation and optimization. Engineers can confidently adjust parameters, validate new recipes, and scale innovative techniques without compromising uniformity or reliability. This flexibility shortens development cycles, improves time-to-market, and supports continuous innovation in advanced semiconductor processes.

Wafer fabs face significant reliability challenges. Aging equipment and unpredictable power fluctuations that can disrupt production or damage sensitive tools, while ever-changing requirements for power density and thermal management adds further complexity. These issues are compounded by the need for continuous uptime and extremely tight process tolerances. Advanced Energy understands these challenges and leads the industry in addressing them with robust, intelligent power systems that adapt to dynamic load conditions, help maintain stability, and provide predictive insights to minimize downtime and optimize performance.

Advanced Energy designs its power solutions to comply with SEMI F47 standards, helping equipment tolerate short-term voltage dips without the logic/control shutting down. This includes ride-through capabilities and low total harmonic distortion, which help maintain stable operation during grid disturbances. These features are especially important in fabs where even brief interruptions can lead to significant losses.

Many of Advanced Energy’s power solutions are designed with modularity and configurability in mind, allowing integration into a wide variety of existing semiconductor platforms. These include configurable power supplies with multiple DC outputs, flexible input options, and digital communication protocols that support legacy and modern systems alike. However, some advanced technologies, especially those developed for next-generation processes, may require specific platform capabilities or retrofitting to function optimally. Therefore, while AE offers broad support for existing equipment, compatibility should be evaluated on a case-by-case basis depending on the toolset, process requirements, and integration needs.