For decades, Advanced Energy's Trek e-chuck supplies have been integral to the semiconductor industry. By employing a Trek supply, you can enhance your throughput, increase uptime, virtually eliminate issues like sticky wafers and wafer popping, and also reduce backside gas errors.
- Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
- Increases efficiency and throughput with custom clamp and declamp sequences and wave shapes
- Eliminates sticky/popping wafer issues
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