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MAXstream

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Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications

Advanced Energy’s MAXstream™ line is the next generation of remote plasma sources for chamber cleaning. The MAXstream is available in 3, 6, 8, 10, and 12 SLPM NF3 flow rates to optimize price and performance. Ensuring long chamber life and low particle generation, Advanced Energy brings its proven and differentiated plasma source materials and technology. The unique dual ignition core design delivers best-in-class plasma ignition reliability. Featuring a reliable and strike-every-time ignition, MAXstream RPS offers more consistent operation and less downtime for RPS maintenance. The MAXstream RPS facilitates drop-in compatibility with traditional RPS systems, simplifying design-in compatibility as well as enabling seamless field upgrades to a new reliable and repeatable solution.

Features

  • Five models: MAXstream 300 for low flow applications and MAXstream 600, 800, 1000, 1200 for higher flow applications
  • Highly reliable RPS maximizes tool uptime
  • Drop-in capability with traditional RPS units for an easy design upgrade path to higher performance and reliability
  • Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion
  • Active monitoring and control of plasma power for industry-leading power control

Benefits

  • Enable customers to optimize cost via multiple flow options
  • Save valuable tool space with a smaller footprint than Xstream RPS
  • Achieve virtually 100% ignition reliability with unique AE dual ignition cores
  • Increase chamber life with AE proprietary high purity aluminum substrate with Type 3 anodization
  • Reduce cleaning time with up to 12 SLPM flow capabilities

Specifications

Cooling: Water
Output Frequency (MHz, kHz): 400 kHz
Input Voltage (V): 208 VAC
Power Level (kW): 6 to 12 kW
Rack Width: N/A, chamber mounted
Communications Interface: RS-232, Analog, Ethernet, EtherCAT
Process Applications: Chamber Clean, Reactive Etch, Reactive Deposition
Chemical Compatibility: Ar, O2, H2, N2, F2, H2O, NF3, CxFy
All Specifications

Technical Documentation

Technical Videos

Services

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Refurbishments

Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit

Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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24/5 Support Available

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