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Pulsed and DC Power Systems

Elevate plasma process innovation with Advanced Energy's comprehensive DC and pulsed-DC suite — designed to minimize arcing while enhancing deposition rates and improving film flatness and packing density.

Pulsed and DC Power Systems

Ascent AMS

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

Ascent AP

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Ascent DMS

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Pinnacle III

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III+

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Series

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® Series

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

Featured Products

Featured

Ascent AP

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Datasheet

Technical Documentation

Title Type
Ascent AP Data Sheet (7 MB) Data Sheet
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) Case Study
PowerInsight by Advanced Energy (6 MB) Brochure
Glass Production Solutions Brochure (12 MB) Brochure
Ascent AMS Data Sheet (865 KB) Data Sheet
Ascent SMS AP 10 Data Sheet (4 MB) Data Sheet
Pinnacle Plus Data Sheet (2 MB) Data Sheet
Pinnacle Series Data Sheet (2 MB) Data Sheet
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB) White Paper
Optimizing Static Deposition Processes White Paper (779 KB) White Paper
PEII Series Data Sheet (1 MB) Data Sheet
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB) White Paper
Ascent Ams Datasheet (309 KB) Data Sheet
Pinnacle Series Datasheet (2 MB) Data Sheet

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