Semiconductor Manufacturing

Enable advanced plasma processes control via highly accurate power delivery, frequency tuning, and multi-level pulsing. 

To manufacture leading-edge integrated circuits (ICs), new processes and materials are deployed for transistor or memory cell creation. Declining feature size and atomic-level precision make extreme process control essential. And new device architectures (3D-NAND and Fin FETs) drive multi-patterning (double and quadruple) demand — making innovative etch and deposition processes vital.

Advanced Energy is a market leader in power delivery and control solutions for critical etching, deposition, inspection, implantation, and annealing processes. Thanks to our platform architecture and commitment to innovation, we can develop strategic partnerships, anticipate your application needs, and rapidly design products and solutions for your specific requirements.

 

Semiconductor Manufacturing Solutions

Inspection - Semiconductor - Advanced Energy

Inspection

Reduce Technical Program Risks and Enable Demanding Applications

Ion Implantation - Advanced Energy

Implant & RTP

Better Control Implantation and Annealing Processes

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Deposition

Optimize Power Accuracy, Precision, Speed, and Process Repeatability

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Etch

Unleash the Precision and Speed Needed for Advanced Conductor Etch

Thank You

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.