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Pulsed and DC Power Systems

Elevate plasma process innovation with Advanced Energy's comprehensive DC and pulsed-DC suite — designed to minimize arcing while enhancing deposition rates and improving film flatness and packing density.

Pulsed and DC Power Systems

Ascent AMS Pulsed and DC Power System

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

Ascent AP Pulsed and DC Power System

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Ascent DMS Pulsed and DC Power System

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Pinnacle III Pulsed and DC Power System

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III+ Pulsed and DC Power System

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Pulsed and DC Power System

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® Pulsed and DC Power System

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

Featured Products

Featured

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Datasheet

Technical Documentation

Title Type
Ascent AP Data Sheet (9 MB) Brochure
Ascent® AMS Brochure (2 MB) Brochure
Glass Production Solutions Brochure (12 MB) Brochure
Glass Production Solutions Brochure (12 MB) Brochure
PowerInsight by Advanced Energy (6 MB) Brochure
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) Case Study
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) Case Study
Ascent Ams Datasheet (309 KB) Data Sheet
Ascent SMS AP 10 Brochure (5 MB) Data Sheet
PEII Series Data Sheet (1 MB) Data Sheet
Pinnacle Plus Data Sheet (2 MB) Data Sheet
Pinnacle Series Data Sheet (2 MB) Data Sheet
Pinnacle Series Datasheet (2 MB) Data Sheet
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB) White Paper
Optimizing Static Deposition Processes White Paper (779 KB) White Paper
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB) White Paper

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