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Pinnacle III+ Pulsed and DC Power System

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Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films

Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
  • Charge clearing during the reverse pulse prevents arcs from developing
  • Adjustable process through frequency and duty cycle control
  • Compact air-cooled design expandable in main/satellite configurations

Features

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 
  • Superior arc management
  • Dual output available for multi-chamber production 

Benefits

  • Higher deposition and yield rates 
  • Superior film uniformity and quality 
  • Reduced substrate damage caused by arcing 
  • Excellent process flexibility and latitude 
  • Repeatable performance

Specifications

Cooling: Air
Output Frequency (MHz, kHz): 5 to 350 kHz
Input Voltage (V): 208, 400, 440, 480 VAC
Power Level (kW): 1.5 to 10 kW
Rack Width: Full rack
Height (Inches): 3U
Output Voltage Range (V): 325-800 V
Communications Interface: Ethernet, EtherCAT, DeviceNet, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
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Technical Documentation

Services

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Agreement Term Options

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

Conversion

Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Refurbishments

Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit

Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality

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