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首页产品等离子电源产品脉冲和直流电源系统

脉冲和直流电源系统

利用 Advanced Energy 全面的直流和脉冲直流套件推进等离子工艺创新，在提高沉积率、改善薄膜平整度和堆积密度的同时最大限度减少电弧。

脉冲和直流电源系统

Ascent AMS Pulsed and DC Power System

Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync® technology — primary/secondary up to 12 units

Ascent AP Pulsed and DC Power System

Process customization with extensive power delivery parameters
Advanced process management through a tiered approach to arc mitigation
Compact, single-unit solution (up to 30 kW)

Ascent DMS Pulsed and DC Power System

Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron

Pinnacle III DC Power Supply

Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

Adjustable frequency range of 5 to 350 kHz 
Variable duty cycle up to 45% 
Wide voltage range — single-tap wide impedance range

PEII Low Frequency Power Supply

High power density
Wide tap range
Regulation on power, voltage, or current
Enhanced arc control
Automatic process safeguard
Flexible modularity
Efficient, compact design

Solvix® DC and Pulsed Power Supply

Proven reliability, accuracy, and repeatability
Worldwide support network
Reduced substrate damage and process contamination
Best-in-class arc handling
DC and pulsed-DC units
Current, power, and voltage regulation modes
Flexible architecture
Air cooling
Multiple units configurable for high-power requirements
High peak-to-peak voltages (high-frequency models)
Patented tapless wide output load impedance range (medium-frequency models)

特色产品

特色

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

技术文档

标题	类型
Ascent AP Data Sheet (9 MB)	手册
Ascent® AMS Brochure (2 MB)	手册
Glass Production Solutions Brochure (12 MB)	手册
Glass Production Solutions Brochure (12 MB)	手册
PowerInsight by Advanced Energy (6 MB)	手册
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	案例研究
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	案例研究
Ascent Ams Datasheet (309 KB)	数据表
Ascent SMS AP 10 Brochure (5 MB)	数据表
PEII Series Data Sheet (1 MB)	数据表
Pinnacle Plus Data Sheet (2 MB)	数据表
Pinnacle Series Data Sheet (2 MB)	数据表
Pinnacle Series Datasheet (2 MB)	数据表
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB)	白皮书
Optimizing Static Deposition Processes White Paper (779 KB)	白皮书
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB)	白皮书

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半导体

AE 可提供精确的等离子功率传输和精密的高速控制，为下一代工艺创新铺平道路。

探索半导体

Solar Photovoltaics

To compete in today’s energy market, photovoltaic (PV) fabrication enterprises require solar manufacturing equipment that increases productivity and reduces costs.

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Flat Panel Display

As display size and resolution continue to take off, the demand for high-quality displays is greater than ever.

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Glass

Trusted Solutions for Glass Production: Advanced Energy offers a complete solution for every stage of the manufacturing process for flat glass, container glass, specialty glass, technical glass, and glass coating.

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