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DC und gepulste DC-Systeme

Steigern Sie die Innovation bei Plasmaprozessen mit den vielfältigen DC- und Puls-DC-Systemen von Advanced Energy, die darauf ausgelegt ist, die optimalen Prozessergebnisse zu erhalten und stetig zu verbessern.

DC und gepulste DC-Systeme

Ascent AMS Pulsed and DC Power System

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

Ascent AP Pulsed and DC Power System

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Ascent DMS Pulsed and DC Power System

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Pinnacle III DC Power Supply

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Low Frequency Power Supply

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® DC and Pulsed Power Supply

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

Ausgewählte Produkte

Highlight

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Datenblatt

Technische Dokumentation

Titel Typ
Ascent AP Data Sheet (9 MB) Broschüre
Ascent® AMS Brochure (2 MB) Broschüre
Glass Production Solutions Brochure (12 MB) Broschüre
Glass Production Solutions Brochure (12 MB) Broschüre
PowerInsight by Advanced Energy (6 MB) Broschüre
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) Fallstudie
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) Fallstudie
Ascent Ams Datasheet (309 KB) Datenblatt
Ascent SMS AP 10 Brochure (5 MB) Datenblatt
PEII Series Data Sheet (1 MB) Datenblatt
Pinnacle Plus Data Sheet (2 MB) Datenblatt
Pinnacle Series Data Sheet (2 MB) Datenblatt
Pinnacle Series Datasheet (2 MB) Datenblatt
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB) Weißbuch
Optimizing Static Deposition Processes White Paper (779 KB) Weißbuch
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB) Weißbuch

Verwandte Anwendungen

Alle Anwendungen erkunden

Halbleiterindustrie

AE bietet präzise Plasma-Stromversorgungen mit modernen und ultra-schnellen Steuerungen für die Prozessinnovationen von Morgen an.
Halbleiterindustrie entdecken

Solar Photovoltaics

To compete in today’s energy market, photovoltaic (PV) fabrication enterprises require solar manufacturing equipment that increases productivity and reduces costs.
Explore Solar Photovoltaics

Flat Panel Display

As display size and resolution continue to take off, the demand for high-quality displays is greater than ever.
Explore Flat Panel Display

Glass

Trusted Solutions for Glass Production: Advanced Energy offers a complete solution for every stage of the manufacturing process for flat glass, container glass, specialty glass, technical glass, and glass coating.
Explore Glass

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