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홈 제품 플라즈마 전원 제품 펄스 및 DC 전원 시스템

Pulsed and DC Power System

증착 속도를 향상시키고 필름 평탄도 및 패키징 밀도를 개선하면서 아크를 최소화하도록 설계된 Advanced Energy의 포괄적인 DC 및 pulsed-DC 제품군으로 플라즈마 공정을 혁신하세요.

Pulsed and DC Power System

Ascent AMS Pulsed and DC Power System

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

Ascent AP Pulsed and DC Power System

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Ascent DMS Pulsed and DC Power System

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Pinnacle III DC Power Supply

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Low Frequency Power Supply

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® DC and Pulsed Power Supply

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

주요 제품

추천

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

데이터 시트

기술 문서

제목 유형
Ascent AP Data Sheet (9 MB) 브로셔
Ascent® AMS Brochure (2 MB) 브로셔
Glass Production Solutions Brochure (12 MB) 브로셔
Glass Production Solutions Brochure (12 MB) 브로셔
PowerInsight by Advanced Energy (6 MB) 브로셔
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) 사례 연구
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) 사례 연구
Ascent Ams Datasheet (309 KB) 데이터 시트
Ascent SMS AP 10 Brochure (5 MB) 데이터 시트
PEII Series Data Sheet (1 MB) 데이터 시트
Pinnacle Plus Data Sheet (2 MB) 데이터 시트
Pinnacle Series Data Sheet (2 MB) 데이터 시트
Pinnacle Series Datasheet (2 MB) 데이터 시트
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB) 백서
Optimizing Static Deposition Processes White Paper (779 KB) 백서
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB) 백서

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