Plasma Power Generators

Arc-Bias Solvix

An Arc-Bias Solution that Brings a New Level of Precision and Productivity to Cathodic Arc Processes

Solvix power supplies are specifically designed to enable advanced, high-tech coatings.

  • New coating capabilities with precision bias generators
  • Industry-leading reliability while powering extremely dynamic ARC processes
  • System optimization with a wide variety of models available
  • Overview
  • Technical Specs
  • Service & Support

Overview

Powerful arc discharges, rapid vaporization of target material, and high-energy ions make cathodic arc deposition both powerful and potentially unstable. Available at a range of current levels up to 400 A, Solvix® arc supplies deliver excellent plasma ionization, ion energy, and throughput — with remarkable power and process control. Solvix supplies add an even greater degree of control over film properties, for remarkably hard, dense, durable, adherent films.

Benefits

  • Reduced substrate damage and better yield
  • Excellent film density and adhesion
  • Proven reliability and high throughput
  • Adaptability to a wide range of process requirements
  • Efficient installation and support

Features

  • Range of current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high power requirements
  • High-performance DSP regulator
  • Technology

    Pulsed-DC bias and ARC source models

  • Power

    ARC units

    60, 100, 210, and 400 A 

    Bias units

    3 to 30 kW

  • Frequency

    ARC units

    Up to 200 Hz 

    Bias units

    Up to 350 kHz (bias)

  • Other

    Cooling

    Air

    Communication

    Analog (RS-232/485 & Profibus available) 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.