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Electron Beam Inspection

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As the industry progresses toward increasingly smaller nodes, AE provides advanced solutions for superior resolution in electron beam inspection.

Precise Power Control for Accurate Electron Beam Inspection

In logic and memory fabrication processes that require high sensitivity, e-beam systems provide superior resolution compared to other techniques. Advanced Energy's solutions provide precise, reliable performance to ensure the detection of defects that other systems might miss.
 

 
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