Electron Beam Inspection
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As the industry progresses toward increasingly smaller nodes, AE provides advanced solutions for superior resolution in electron beam inspection.
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Precise Power Control for Accurate Electron Beam Inspection
In logic and memory fabrication processes that require high sensitivity, e-beam systems provide superior resolution compared to other techniques. Advanced Energy's solutions provide precise, reliable performance to ensure the detection of defects that other systems might miss.
Featured Products
Featured
Trek 645 Series
Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV
| Low Power | 35 kV High Voltage Power Supply for Scanning Electron Microscopes | |
| E-Chuck | Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV | |
| Thermal Sensing | High-Performance, Infrared Camera for Temperature Measurement between -40 and 1600°C | |
| Configurable/Modular Industrial & Medical PSUs | Up to 4000 W Configurable AC-DC Power Supplies | |
| Eletrostatic Voltmeters | Precision, Non-Contact Electrostatic Voltmeter | |
| Systems Up To 5 kV | High Voltage Amplifier for Precise Control of Bipolar Output Voltages, 0 to ±2 kV DC or Peak AC | |
| ESD Instrumentation | Compact Charged Plate Monitor for Evaluating Air Ionization System Performance | |
| ESD Instrumentation | Hand-Held Electrostatic Voltmeters for ESD Applications | |
| E-Chuck | Software-Driven Electrostatic Chuck Controller, Output Voltage ±1 kV at 20 mA. | |
| Thermal Sensing | Single-Channel Non-Contact Temperature Measurement with Selectable Emissivity |