Plasma Power Generators

Navigator II FCi

Agile, Precise Power Delivery for Demanding High-Speed Matching Applications

Advanced Energy's Navigator II FCi enables improved process control with precise power delivery and tuning. The high-speed matching network is optimized for critical, power sensitive, short duration plasma process steps. Conventional longer steps and wide tuning range, traditionally handled by vacuum capacitor-based matching networks, are also supported. Through high-speed tuning, the Navigator II FCi offers many process control enhancements.

  • Reduced plasma stabilization time
  • No plasma dropout between process recipe transitions

 

  • Overview
  • Technical Specs
  • Documents
  • Service & Support

Overview

The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, ac­curate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).

When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The com­pactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. This match has no moving mechanical parts, eliminating wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.

Benefits

  • Achieve fast, accurate tuning across a wide impedance range
  • Improve reliability and repeatability
  • Reduce power delivery interruption and “winking-out” of plasma
  • Utilize technology for short process steps, such as ALE applications

Features

  • 13.56 MHz
  • CW and pulse operation
  • Output measurement sensor
  • Air cooled
  • Output Voltage

    1200 Vrms maximum

    1000 VDC Maximum DC bias voltage

  • Output Current

    35 A RMS Maximum

  • Frequencies

    13.56 MHz

  • RF Power Input

    1500 W Delivered, maximum

    150 W Reflected, maximum

  • Reflected Power (matched automatic tune)

    5 W or < 1% of forward power, whichever is greater

  • Line Voltage

    24 ±10% VDC

  • Line Current

    3.5 A maximum

  • Cooling

    Air

  • Ambient Operating Air Temperature Range

    +5 to +40°C

Global Support & Services

Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

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Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


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