Plasma Power Generators
Navigator II FCi
Agile, Precise Power Delivery for Demanding High-Speed Matching Applications
Advanced Energy's Navigator II FCi enables improved process control with precise power delivery and tuning. The high-speed matching network is optimized for critical, power sensitive, short duration plasma process steps. Conventional longer steps and wide tuning range, traditionally handled by vacuum capacitor-based matching networks, are also supported. Through high-speed tuning, the Navigator II FCi offers many process control enhancements.
- Reduced plasma stabilization time
- No plasma dropout between process recipe transitions
- Technical Specs
- Service & Support
The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, accurate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).
When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The compactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. This match has no moving mechanical parts, eliminating wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.
- Achieve fast, accurate tuning across a wide impedance range
- Improve reliability and repeatability
- Reduce power delivery interruption and “winking-out” of plasma
- Utilize technology for short process steps, such as ALE applications
- 13.56 MHz
- CW and pulse operation
- Output measurement sensor
- Air cooled
1200 Vrms maximum
1000 VDC Maximum DC bias voltage
35 A RMS Maximum
RF Power Input
1500 W Delivered, maximum
150 W Reflected, maximum
Reflected Power (matched automatic tune)
5 W or < 1% of forward power, whichever is greater
24 ±10% VDC
3.5 A maximum
Ambient Operating Air Temperature Range
+5 to +40°C
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.