Plasma Power Generators
Navigator II FCi
Agile, Precise Power Delivery for Demanding High-Speed Matching Applications
Advanced Energy's Navigator II FCi enables improved process control with precise power delivery and tuning. The high-speed matching network is optimized for critical, power sensitive, short duration plasma process steps. Conventional longer steps and wide tuning range, traditionally handled by vacuum capacitor-based matching networks, are also supported. Through high-speed tuning, the Navigator II FCi offers many process control enhancements.
- Reduced plasma stabilization time
- No plasma dropout between process recipe transitions
- Technical Specs
- Service & Support
The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, accurate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).
When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The compactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. This match has no moving mechanical parts, eliminating wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.
- Achieve fast, accurate tuning across a wide impedance range
- Improve reliability and repeatability
- Reduce power delivery interruption and “winking-out” of plasma
- Utilize technology for short process steps, such as ALE applications
- 13.56 MHz
- CW and pulse operation
- Output measurement sensor
- Air cooled
1200 Vrms maximum
1000 VDC Maximum DC bias voltage
35 A RMS Maximum
RF Power Input
1500 W Delivered, maximum
150 W Reflected, maximum
Reflected Power (matched automatic tune)
5 W or < 1% of forward power, whichever is greater
24 ±10% VDC
3.5 A maximum
Ambient Operating Air Temperature Range
+5 to +40°C
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.