Navigator II | Advanced Energy
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Navigator II


Rapid, Accurate, and Reliable Digitally-Tuned Matching

The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.


  • Digital architecture with enhanced tuning algorithms
  • Pulsed-RF power delivery
  • Sweep-frequency operation
  • Intermodulation distortion (IMD) immunity for multi-frequency applications
  • Real-time process power and impedance measurement


  • Speeds tuning/matching response time
  • Tightens process control
  • Helps increase tool throughput and product yield


Kühlung: Hybrid (air and water)
Ausgangsfrequenz (MHz, kHz): 400 kHz to 60 MHz
Eingangsspannung (V): 110 VAC
Leistungsstufe (kW): 1 to 60 kW
Rack Breite: N/A, chamber mounted
Kommunikationsschnittstelle: EtherCAT, Ethernet, DeviceNet, RS-232
Erweiterte Funktionen: Pulsing, CEX
Anwendungen verarbeiten: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

24/5 Support verfügbar

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