Luxtron M-1000 Fiber Optic Temperature Converter
FluorOptic Temperature Converter For Measurements Between -200 to 450 °C in Semiconductor Applications
Advanced Energy’s Luxtron® FluorOptic Temperature (FOT) Sensors use the principles of phosphorescence to deliver high-accuracy temperature monitoring for critical semiconductor applications such as plasma etch and plasma enhanced deposition. The sensors are immune to interference from RF and microwave sources, enabling precise process control required to achieve device performance and yield for leading edge semiconductor devices.
The Luxtron M-1000 is the latest FOT converter platform, featuring an advanced light source and improved electronics for ultralow noise. In addition, two new proprietary phosphor formulations, VioLux™ and RubiLux™, have been developed to work in concert with the M-1000 to deliver sub 0.5 °C accuracy, and excellent repeatability, and stability over an extended range -200 to 450 °C. This extended temperature range enables both cryogenic and high temperature etch processes, both of which are critical for etching advanced high aspect ratio devices, such as 3D NAND.