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Luxtron M-1100 Fiber Optic Temperature Converter

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Fiber optic temperature sensing for semiconductor in etch and deposition applications

The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.

特点

  • Wide supported temperature range
  • Low noise level with fast response rate
  • 5 channels in a single converter
  • Flexible communication outputs
  • EtherCAT Interface (optional)
  • Analog output

益处

  • Non-contact measurement to minimize the thermal offset
  • Easy to install into OEM equipment
  • Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
  • Utilize AE's experienced application engineering support to develop custom probes for OEMs

规格

工作温度范围 (°C): 5 to 60
通道数: Up to 5
准确性: ± 0.5 °C
噪音(°C): ≤ 0.05 °C
测量范围: -200 to 450
通信接口: ECAT, 4 to 20 mA or 0 to 10 V

比较

Model Luxtron M-1100 Luxtron M900 WaveCapture FBG Analyzer Series
通道数 Up to 5 4 to 64 1
准确性 ± 0.5 °C ±0.5 to ± 0.1 °C +/-5 pm
噪音(°C) ≤ 0.05 °C < 0.1 °C 1 pm
通信接口 ECAT, 4 to 20 mA or 0 to 10 V RS232, RS485 USB 2.0, RS232, Ethernet IEEE 802.3

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Code added on 30 Aug 24

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