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Luxtron M-1100 Fiber Optic Temperature Converter
Active
Fiber optic temperature sensing for semiconductor in etch and deposition applications
The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.
特点
- Wide supported temperature range
- Low noise level with fast response rate
- 5 channels in a single converter
- Flexible communication outputs
- EtherCAT Interface (optional)
- Analog output
益处
- Non-contact measurement to minimize the thermal offset
- Easy to install into OEM equipment
- Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
- Utilize AE's experienced application engineering support to develop custom probes for OEMs
规格
| 工作温度范围 (°C): | 5 to 60 |
|---|---|
| 通道数: | Up to 5 |
| 准确性: | ± 0.5 °C |
| 噪音（°C）: | ≤ 0.05 °C |
| 测量范围: | -200 to 450 |
| 通信接口: | ECAT, 4 to 20 mA or 0 to 10 V |
技术文档
软件
比较
| Model | Luxtron M-1100 | Luxtron M900 | WaveCapture FBG Analyzer Series |
|---|---|---|---|
| 通道数 | Up to 5 | 4 to 64 | 1 |
| 准确性 | ± 0.5 °C | ±0.5 to ± 0.1 °C | +/-5 pm |
| 噪音（°C） | ≤ 0.05 °C | < 0.1 °C | 1 pm |
| 通信接口 | ECAT, 4 to 20 mA or 0 to 10 V | RS232, RS485 | USB 2.0, RS232, Ethernet IEEE 802.3 |
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