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Luxtron M-1100 Fiber Optic Temperature Converter

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Fiber optic temperature sensing for semiconductor in etch and deposition applications

営業担当データシート

The Advanced Energy's Luxtron^® M-1100 is the latest FluorOptic^® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLux^TMand RubiLux^TMhave been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.

特徴仕様技術文書ソフトウェア Support

特徴

Wide supported temperature range
Low noise level with fast response rate
5 channels in a single converter
Flexible communication outputs
EtherCAT Interface (optional)
Analog output

メリット

Non-contact measurement to minimize the thermal offset
Easy to install into OEM equipment
Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
Utilize AE's experienced application engineering support to develop custom probes for OEMs

仕様

動作温度範囲 (°C):	5 to 60
チャンネル数:	Up to 5
精度:	± 0.5 °C
騒音 (°C):	≤ 0.05 °C
測定範囲:	-200 to 450
通信インターフェース:	ECAT, 4 to 20 mA or 0 to 10 V

技術文書

タイトル	タイプ
Etching and Wafer Fab Equipment Application Note (131 KB)	アプリケーションノート
A Brief History of Phosphor Thermometry (1 MB)	記事
Luxtron M-1100 Data Sheet (291 KB)	データシート
Luxtron® Fiber Optic Thermometry Probes & Accessories (310 KB)	データシート

ソフトウェア

TrueTemp+

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比較する

Model	Luxtron M-1100	Luxtron M900	WaveCapture FBG Analyzer Series
チャンネル数	Up to 5	4 to 64	1
精度	± 0.5 °C	±0.5 to ± 0.1 °C	+/-5 pm
騒音 (°C)	≤ 0.05 °C	< 0.1 °C	1 pm
通信インターフェース	ECAT, 4 to 20 mA or 0 to 10 V	RS232, RS485	USB 2.0, RS232, Ethernet IEEE 802.3