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Xstream Remote Plasma Source


High-Quality, Chamber-Clean Remote Plasma Source with Unrivaled Performance

The highly efficient Xstream® RPS dissociates large volumes of NF3 and quickly cleans chambers, improving your overall tool performance. Its plasma chamber showcases high-purity aluminum alloy and patented cooling capabilities. Built to last for years without repair or expensive chamber coatings, the Xstream RPS is the smart choice for dependability and efficient performance.


  • Highly reliable RPS maximizes tool uptime
  • Effective reactive species transportation to process chamber for improved performance
  • Transformer coupled plasma (TCP) source with integrated Active Match Network (AMN)
  • 225 kHz to 660 kHz operating frequency
  • 8 kW/10 kW power models


  • Eliminate expensive chamber coatings with custom aluminum alloy and Type III hard anodization 
  • Improve chamber performance and durability via a cooling system that minimizes thermal stress
  • Increase efficiency and improve power delivery to the plasma with an Active Match Network
  • Precisely control power and processes thanks to real-time plasma measurements
  • Achieve reliable and reproducible plasma ignition via a patented ignition system 


Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 400 kHz
Input Voltage (V): 208 VAC
Power Level (kW): 6 kW
Rack Width: N/A, chamber mounted
Communications Interface: RS-232, Analog, Ethernet, EtherCAT
Process Applications: Chamber Clean, Reactive Etch, Reactive Deposition
Chemical Compatibility: Ar, O2, H2, N2, F2, H2O, NF3, CxFy
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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
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