Paramount HFi | Advanced Energy
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Paramount HFi


Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System

The Paramount® HFi is an integrated RF delivery solution for deposition and other semiconductor plasma-based processes. An electrically switchable solid-state capacitor array is physically integrated with the RF power amplifier providing the most compact form-factor power delivery system available. With an overall package size nearly equal to that of a traditional RF power generator, this design also includes the matching network within the common enclosure. The matching network, with 32 tune range positions, allows for reliable RF power delivery across a wide range of impedances. 

In addition to a reduced footprint, mechanically driven vacuum capacitors are replaced in the integrated matching network with solid state components for increased reliability and repeatability—crucial attributes in high-cycle, repetitive pro­cesses. By elim­inating the traditional stand-alone vacuum capacitor matching network, very fast tuning and direct power regulation are achieved, reducing latency in today’s short-cycle, high step-count deposition processes.


  • 32 tune range positions with millisecond switching speeds to enable the shortest process steps
  • Controllable tune range positions optimize the impedance range to customer process
  • Water-cooled with no requirements for external air exchange
  • Common exciter (CEX) mode to sync multiple systems in cluster configurations
  • RS-232, Ethernet, and EtherCAT communication


  • Utilize faster tuning speeds to enables stable performance even in the shortest process steps
  • Decrease costs with integrated package configuration when compared to separate generator and matching network
  • Free up valuable real estate on multi-wafer chamber deposition systems with reduced footprint


Kühlung: Water
Ausgangsfrequenz (MHz, kHz): 13.56 MHz
Eingangsspannung (V): 208 VAC
Leistungsstufe (kW): 3 kW
Rack Breite: N/A, chamber mounted
Kommunikationsschnittstelle: RS-232, 25-pin analog, Ethernet, EtherCAT
Erweiterte Funktionen: CEX
Anwendungen verarbeiten: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

Technische Dokumentation


Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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