Plasma Power Generators
Proven, Mid-Frequency Workhorse with Industry-Leading Reliability
The PDX series features mid frequency power supplies that enhance process flexibility and optimize control.
- Available in power ranging from 1250 to 8000 W
- Wide frequency range operation
- Remote operation capabilities
- Technical Specs
- Service & Support
Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency range of operation delivers optimal control across numerous applications.
The PDX low-power (LP) series is available in 1250 W and 1400 W versions and the PDX high-power (HP) series is available in 5000 W and 8000 W versions.
- Enhance process flexibility
- Improve throughput
- Optimize process control
- Ensure high repeatability
- Ease integration
- Sinusoidal RF output for low harmonic distortion
- Low EMI/RFI
- Tightly regulated output power
- Robust frequency range for optimal process control
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.