Plasma Power Generators
PDX
Proven, Mid-Frequency Workhorse with Industry-Leading Reliability
The PDX series features mid frequency power supplies that enhance process flexibility and optimize control.
- Available in power ranging from 1250 to 8000 W
- Wide frequency range operation
- Remote operation capabilities
- Overview
- Technical Specs
- Documents
- Service & Support
Overview
Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency range of operation delivers optimal control across numerous applications.
The PDX low-power (LP) series is available in 1250 W and 1400 W versions and the PDX high-power (HP) series is available in 5000 W and 8000 W versions.
Benefits
- Enhance process flexibility
- Improve throughput
- Optimize process control
- Ensure high repeatability
- Ease integration
Features
- Sinusoidal RF output for low harmonic distortion
- Low EMI/RFI
- Tightly regulated output power
- Robust frequency range for optimal process control
Data Sheets
Brochures
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support