Plasma Power Generators

LFGS

Economical, Mid-Frequency Generator Tailored for Plasma Processing

  • Wide-output frequency range
  • Compact design
  • Flexible communication protocol
  • Overview
  • Technical Specs
  • Service & Support

Overview

The versatile, variable-frequency LFGS generator (1250 W, 40 to 500 kHz) suits a wide variety of semiconductor and general plasma-processing applications, including sputtering, reactive ion etching, plasma deposition, polymerization, and surface treatment. Its compact 19", rack-mountable, air-cooled package eases installation and saves valuable space. With a half-bridge, class-D amplifier design, the LFGS power supply enables the lowest reflected power commercially available. 

Benefits

  • Support a wide variety of applications
  • Access the lowest reflected power commercially available
  • Easily install
  • Efficiently use valuable space

Features

  • Variable frequency
  • Air cooling
  • Enhanced operating menu  
  • Active front panel
  • Pulse mode (0 to 10 kHz) CEX operation mode 2 analog user ports
  • RS-232, Ethernet, and Profibus communication

Global Support & Services

Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546


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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.