Plasma Power Generators
Economical, Mid-Frequency Generator Tailored for Plasma Processing
- Wide-output frequency range
- Compact design
- Flexible communication protocol
- Technical Specs
- Service & Support
The versatile, variable-frequency LFGS generator (1250 W, 40 to 500 kHz) suits a wide variety of semiconductor and general plasma-processing applications, including sputtering, reactive ion etching, plasma deposition, polymerization, and surface treatment. Its compact 19", rack-mountable, air-cooled package eases installation and saves valuable space. With a half-bridge, class-D amplifier design, the LFGS power supply enables the lowest reflected power commercially available.
- Support a wide variety of applications
- Access the lowest reflected power commercially available
- Easily install
- Efficiently use valuable space
- Variable frequency
- Air cooling
- Enhanced operating menu
- Active front panel
- Pulse mode (0 to 10 kHz) CEX operation mode 2 analog user ports
- RS-232, Ethernet, and Profibus communication
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.