Plasma Power Generators
HiLight
A Compact, Economical, Easy to Install, Low Power RF Platform
Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.
- Economical
- Flexible, single-phase input
- Compact design
- Overview
- Technical Specs
- Documents
- Service & Support
Overview
Designed for use with 230 VAC, single-phase input power, the HiLight™ generators provide up to 600 W into a 50 Ω, non-reactive load. HiLight RF generators provide accurate power regulation and incorporate internal protection limits that enable safe and reliable operation. The RF generators are compact and lightweight, permitting you to mount directly on the tool or chamber. HiLight generators are controlled via a 25-pin analog user port.
Benefits
- Easily install in non-19" rack mounts
- Increase accuracy and reliability with wave or pulsing modes
Features
- Compact, lightweight shoebox design
- Air cooling
- Wave and pulse mode
- Phase synchronization (CEX) and pulsing
- Analog user port
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Power
200, 300, and 600 W
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Frequencies
200 W
0.925 MHz
0.902 MHz to 0.948 MHz VCO range for optimum load auto tuning
300 W, 600 W
13.56 MHz
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Available Interfaces
25-pin user port
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AC Input
230 VAC (187 to 253 VAC)
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Line Frequency
50/60 Hz
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Cooling
Air
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Operating Ambient Temperature Range
+5°C to +35°C
+41°F to +95°F
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Brochures
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support