Plasma Power Generators


A Compact, Economical, Easy to Install, Low Power RF Platform

Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.

  • Economical
  • Flexible, single-phase input
  • Compact design
  • Overview
  • Technical Specs
  • Service & Support


Designed for use with 230 VAC, single-phase input power, the HiLight™ generators provide up to 600 W into a 50 Ω, non-reactive load. HiLight RF generators provide accurate power regulation and incorporate internal protection limits that enable safe and reliable operation. The RF generators are compact and lightweight, permitting you to mount directly on the tool or chamber. HiLight generators are controlled via a 25-pin analog user port.


  • Easily install in non-19" rack mounts
  • Increase accuracy and reliability with wave or pulsing modes


  • Compact, lightweight shoebox design
  • Air cooling 
  • Wave and pulse mode
  • Phase synchronization (CEX) and pulsing
  • Analog user port
  • Power

    200, 300, and 600 W

  • Frequencies

    200 W

    0.925 MHz

    0.902 MHz to 0.948 MHz VCO range for optimum load auto tuning

    300 W, 600 W

    13.56 MHz

  • Available Interfaces

    25-pin user port

  • AC Input

    230 VAC (187 to 253 VAC)

  • Line Frequency

    50/60 Hz

  • Cooling


  • Operating Ambient Temperature Range

    +5°C to +35°C

    +41°F to +95°F

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.

Thin Film Support
Thermal Product Support
Other Technical Support

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