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RF Plasma Generators

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From various mounts and sizes to full digital control and dynamic plasma response, our RF generators ignite process innovation. Choose from a broad range of models and access unique features for configuration and control to meet specific application requirements.

RF Plasma Generators

eVerest RF Generator

  • Full RF delivery system, multiple options for matching solutions, and intelligent synchronization
  • Speed and control within programmable multi-level pulse profiles
  • High-speed RF output response and pulse-state rise/fall times

Paramount Plus RF Generator

  • Precise RF and pulse control
  • Fast response to plasma changes
  • Built-in diagnostic tools

Paramount RF Generator

  • Full digital control
  • High power output
  • Enables high plasma density and ion energy

Apex RF Generator

  • High power density
  • Compact installation
  • High-speed arc management

Featured Products

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eVerest RF Generator

Angstrom Era Precision Power

Datasheet

Featured Resources

eVerest Brochure

eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.

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Forward and Reflected Power: What Does It Mean?

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Three Key Cabling Decisions to Optimize RF System Performance

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Technical Documentation

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Technical Videos

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