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High Voltage Power Supplies

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Advanced Energy's high voltage products feature high-performance power supplies. Each product line features a variety of options and accessories to meet your application needs. Customized solutions are also available.

High Voltage Power Supply Types

E-Chuck

Advanced Energy's Trek E-Chuck supplies have been a staple in the semiconductor industry for decades.

High Power

As a part of a numerous High Voltage solutions, Advanced Energy offers high power solutions for a variety of applications. Our portfolio includes High Power DC-DC converters and AC-DC power supplies, with output power ratings up to 10 kW.

Low Power

Advanced Energy provides a line of high voltage, low power systems.

Modules

Advanced Energy keeps the power flowing for various applications, utilizing high stability modules.

UltraVolt High Voltage PCB Mount

Our HiTek, Trek, and Ultravolt product lines are flexible and highly reliable, providing superior power quality and elevating your entire system’s performance.

Featured Products

Featured

Trek 645 Series

Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV

Datasheet

Featured

Trek 605A Series

High Voltage Reference Supply for Precise Control of Output Voltages in Fixed or Variable Modes

Datasheet

Featured

MSP Series

Ultra-Low Ripple, Multi-Purpose, Precision Mass Spectrometry Power Supplies

Datasheet

Featured

OLS10K Series

10 kW AC-to-HVDC Power Supplies Built for 24 x 7 Processes

Datasheet

Related Applications

Explore All Applications

Implant

AE power products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.
Explore Implant

Electron Beam Inspection

Advanced Energy delivers stable, reliable power to electron beam inspection systems. This exacting control enables highly accurate defect identification, ensuring that memory and logic devices meet stringent specifications.
Explore Electron Beam Inspection

Deposition

AE offers a comprehensive portfolio for semiconductor deposition, including plasma power delivery, temperature measurement, temperature control, and wafer control solutions.
Explore Deposition

Etch

Advanced Energy's high-precision plasma power delivery systems provide exacting control of etch applications for high repeatability and yield.
Explore Etch

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