Trek 645-HT Series

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Software-Driven Electrostatic Chuck Controller, Output Voltage Range 0 to ±1 kV

The Trek® 645-HT software-driven electrostatic chuck controller has more current for higher temperature processes. Building on the versatile, trusted performance of the Trek 645 series allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.

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特徴

Lockable front panel control interface
NIST-traceable calibration certificate provided with each unit
Supports both Coulombic and Johnsen-Rahbek ESC technologies
Upload and store electrostatic chuck profiles to the unit via the user-friendly software interface
Wafer detection includes no-wafer, wafer-present, or wafer-clamped status

メリット

Increase throughput and eliminate sticky/popping wafer issues
Adjustable in-process amplitude/offset and output-control versatility
Configurable for custom clamp/declamp sequences and wave shapes
Control parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage, and offset voltage
Parameters can be controlled via the front panel, digital communications interfaces, or analog I/O pins