Plasma Power Generators

Paramount HFi

Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System

Advanced Energy's Paramount HFi is a 13.56 MHz RF power delivery system with an integrated solid-state matching network capable of operating across a wide variety of impedance zones. The solution offers consistent power delivery, high power density, and exceptional reliability.

  • Minimize footprint by mounting the integrated system directly onto the chamber
  • Achieve repeatable power delivery across a wide impedance zone with 32 tune range positions
  • High reliability and reproducibility due to no moving parts
  • Overview
  • Technical Specs
  • Service & Support

Overview

The Paramount® HFi is an integrated RF delivery solution for deposition and other semiconductor plasma-based processes. An electrically switchable solid-state capacitor array is physically integrated with the RF power amplifier providing the most compact form-factor power delivery system available. With an overall package size nearly equal to that of a traditional RF power generator, this design also includes the matching network within the common enclosure. The matching network, with 32 tune range positions, allows for reliable RF power delivery across a wide range of impedances.  

In addition to a reduced footprint, mechanically driven vacuum capacitors are replaced in the integrated matching network with solid state components for increased reliability and repeatability — crucial attributes in high-cycle, repetitive pro­cesses. By elim­inating the traditional stand-alone vacuum capacitor matching network, very fast tuning and direct power regulation are achieved, reducing latency in today’s short-cycle, high step-count deposition processes.

Benefits

  • Utilize faster tuning speeds to enables stable performance even in the shortest process steps
  • Decrease costs with integrated package configuration when compared to separate generator and matching network
  • Free up valuable real estate on multi-wafer chamber deposition systems with reduced footprint

Features

  • 32 tune range positions with millisecond switching speeds to enable the shortest process steps
  • Controllable tune range positions optimize the impedance range to customer process
  • Water-cooled with no requirements for external air exchange
  • Common exciter (CEX) mode to sync multiple systems in cluster configurations
  • RS-232, Ethernet, and EtherCAT communication
  • Power Level

    3 kW

  • Frequencies

    13.56 MHz

  • Available Interfaces

    RS-232, 25-pin analog, Ethernet, EtherCAT

  • AC Input

    208 V nominal; 187 to 229 VAC

  • Line Frequency

    47 to 63 Hz

  • Cooling

    Water

  • Ambient Operating Air Temperature Range

    +5 to +40°C

  • Cooling Water Temperature Range

    +5 to +35°C

  • Advanced Features

    CEX

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

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Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


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