Plasma Power Generators

Ascent AP Series

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Achieve new levels of process performance using field-proven, bipolar DC pulsing technology.

  • Advanced waveform control allows process fine-tuning
  • Available for both dual-pulsed and single-pulsed magnetron sputtering applications
  • Compact design incorporates DC and pulsing
  • Overview
  • Technical Specs
  • Service & Support

Overview

Ascent® AP power supplies deliver unprecedented plasma control in a compact solution for single-magnetron and dual-magnetron sputtering. Advanced Energy’s patented pulsing technology enables remarkable arc prevention, higher power levels, and increased throughput. Ascent AP’s comprehensive control parameters and wide operational range unlock material options to extend process flexibility and material innovation.

Benefits

  • Precise sputtering of dielectric and conductive films
  • Extended process control and flexibility
  • High film quality and throughput
  • Repeatable, customizable films
  • Higher power levels with reduced arc damage
  • Easy integration and control

Features

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)
  • Set Point Compensation™ technology for stable throughput
  • Wide operational range to enable a variety of process materials
  • Power

    Ascent SMS

    30 kW (15 kW)

    Ascent DMS

    30 kW (15 kW)

  • Voltage

    Ascent SMS

    1000 VDC

    Ascent DMS

    1000 VDC

  • Peak Current

    Ascent SMS

    100 A (50 A)

    Ascent DMS

    n/a

  • Average Current

    Ascent SMS

    75 A (38 A)

    Ascent DMS

    80 A (40 A)

  • Frequency

    Ascent SMS

    0.5 to 150 kHz

    Ascent DMS

    0.5 to 150 kHz

  • Reverse Time (max)

    Ascent SMS

    15 µsec 

    Ascent DMS

    n/a

  • Duty Cycle

    Ascent SMS

    > 60% ON time 

    Ascent DMS

    5% to 95% 

  • Reverse Voltage

    Ascent SMS

    300 VDC max

    Ascent DMS

    n/a

  • Pulse Configuration

    Ascent SMS

    Unipolar

    Ascent DMS

    Bipolar

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

Thank You

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.