Plasma Power Generators
Ascent AP Series
Unprecedented Power Control for Single- and Dual-Magnetron Sputtering
Achieve new levels of process performance using field-proven, bipolar DC pulsing technology.
- Advanced waveform control allows process fine-tuning
- Available for both dual-pulsed and single-pulsed magnetron sputtering applications
- Compact design incorporates DC and pulsing
- Overview
- Technical Specs
- Service & Support
Overview
Ascent® AP power supplies deliver unprecedented plasma control in a compact solution for single-magnetron and dual-magnetron sputtering. Advanced Energy’s patented pulsing technology enables remarkable arc prevention, higher power levels, and increased throughput. Ascent AP’s comprehensive control parameters and wide operational range unlock material options to extend process flexibility and material innovation.
Benefits
- Precise sputtering of dielectric and conductive films
- Extended process control and flexibility
- High film quality and throughput
- Repeatable, customizable films
- Higher power levels with reduced arc damage
- Easy integration and control
Features
- Process customization with extensive power delivery parameters
- Advanced process management through a tiered approach to arc mitigation
- Compact, single-unit solution (up to 30 kW)
- Set Point Compensation™ technology for stable throughput
- Wide operational range to enable a variety of process materials
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Power
Ascent SMS
30 kW (15 kW)
Ascent DMS
30 kW (15 kW)
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Voltage
Ascent SMS
1000 VDC
Ascent DMS
1000 VDC
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Peak Current
Ascent SMS
100 A (50 A)
Ascent DMS
n/a
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Average Current
Ascent SMS
75 A (38 A)
Ascent DMS
80 A (40 A)
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Frequency
Ascent SMS
0.5 to 150 kHz
Ascent DMS
0.5 to 150 kHz
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Reverse Time (max)
Ascent SMS
15 µsec
Ascent DMS
n/a
-
Duty Cycle
Ascent SMS
> 60% ON time
Ascent DMS
5% to 95%
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Reverse Voltage
Ascent SMS
300 VDC max
Ascent DMS
n/a
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Pulse Configuration
Ascent SMS
Unipolar
Ascent DMS
Bipolar
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.
Email
Thin Film Support
Thermal Product Support
Other Technical Support