High Voltage Products

Trek 646

Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Advanced Energy’s Trek 646 software-driven electrostatic chuck supply offers versatility and performance for use in multiple processes.

  • Output Phasing: 0 to ±3 kV
  • Output Voltage Range: 0 to ±3 kV
  • Output Current Range: 0 to ±6.5 mADC with a peak capability of 10 mA
  • Overview
  • Technical Specs
  • Documents
  • Service & Support
  • Distributors

Overview

The Trek® 646 software-driven electrostatic chuck supply offers an array of features that accommodate a variety of demanding applications. The instrument incorporates Advanced Energy technology which has demonstrated increases efficiency and throughput equal to three times that of other supplies. The versatile trusted performance of the Trek 646 allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.

Benefits

  • Reduce backside gas errors, increases throughput, and eliminate sticky/popping wafer issues
  • Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
  • Adjust in-process amplitude/offset and output-control versatility
  • Control output using the back panel I/O, serial computer command, or front panel controls
  • Configure for custom clamp and declamp sequences and wave shapes

Features

  • Lockable front panel control interface
  • NIST-traceable calibration certificate provided with each unit
  • Supports both Coulombic and Johnsen-Rahbek ESC technologies
  • Upload and store electrostatic chuck profiles to the unit and stored internally via a user-friendly software interface
  • Wafer detection includes no-wafer, wafer-present or wafer-clamped status

Select specifications are shown below. Please see product data sheet for additional specifications.

  • Outputs

    Output Phasing

    Output Voltage A (reference phase): 0 to ±3 kV
    Output Voltage B (phase B =[-1] x phase A): 0 to ±3 kV 

    Output Voltage Range

    0 to ±3 kV DC, maximum

    Output Current

    0 to ±6.5 mA DC with peak capability of 10 mA

  • Input

    HV Magnitude

    External and internal control

    Offset Voltage

    External or internal control

  • Output Voltage Monitor

    Scale Factor

    Scale Factor 1 V / 300 V

    Phase B DC

    Accuracy better than 0.5% of full-scale

    Offset Voltage

    Less than 10 mV

    Output Noise

    Less than 50 mV rms*

  • Steady State Voltage Leakage Current Monitor

    Scale Factor

    1 V / 1 µA

    DC Accuracy

    ±0.1 µA

    Output Noise

    Less than 50 mV rms*

  • Mechanical

    H x W x D

    88.1 x 431.8 x 531.9 mm (3.47  x 17 x 20.9 in), 1U rack enclosure

    Weight

    11 lbs (5.0 kg)

  • Operating Conditions

    Temperature

    0 to 35°C (32  to 104°F)

    Relative Humidity

    To 85%, non-condensing

    Altitude

    To 2000 meters (6561.68 ft)

  • Electrical

    DC Input Receptacle

    2.0 mm locking DC jack; center contact is
    positive and shell is negative (receptacle mates
    with Switchcraft S761K plug)

    Ground Receptacle

    Ground stud

    Power Requirements

    24 VDC, 2.0 A

  • Typical Applications

    • Electrostatic-driven handling of materials
    • Semiconductor wafer processing
    • Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

Learn More

Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

Learn More

Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

Learn More

Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

 

Find an AE Representative or Distributor

To find distributors and representatives who sell AE products in your area, select your location and vendor type (optional).

Contact Us

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.