Search results for "Remote Plasma Sources"
Remote Plasma SourcesRead More
Remote Plasma Sources
Remote plasma source solutions from Advanced Energy equip your manufacturing and abatement processes with high functionality and exceptional reliability.Read More
Chamber Cleaning with Advanced Energy Remote Plasma Sources
In this video, learn how Advanced Energy's MAXstream remote plasma source (RPS) is used in CVD chamber cleaning. Extending AE’s leadership in process power, MAXstream delivers reliable performance across a broad range of flow rates, increasing productivity in semiconductor process equipment.
High-Quality, Chamber-Clean Remote Plasma Source with Unrivaled PerformanceRead More
Ideal Remote Plasma Source for Oxygen-Based ProcessesRead More
Reliable, High-Performance Remote Plasma Source for Chamber Clean ApplicationsRead More
Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust GassesRead More
MAXstream 300 Data Sheet
The MAXstream 300 is a compact, reliable, and cost-effective remote plasma source (RPS) solution for low flow (2 to 3 SLPM) NF3 chamber clean applications.View Resource
Xstream RPS Data Sheet
Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.View Resource
Rapid OX RPS Data Sheet
Rapid OX is the ideal remote plasma source for oxygen-based processes.View Resource