Search results for "Remote Plasma Sources"

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Downstream Plasma Delivery VHF Source White Paper

A new remote plasma source (RPS) driven by capacitively coupled VHF power is investigated and compared with alternative technologies.

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Xstream RPS Data Sheet

Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.

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Rapid OX RPS Data Sheet

Rapid OX is the ideal remote plasma source for oxygen-based processes.

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RPS Measurement Simulation White Paper

This paper describes a new remote source technology using capacitively coupled, VHF energy to produce a flexible and unique remote plasma generator

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Litmas RPS Data Sheet

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases.

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Quanta RPS Data Sheet

The Quanta remote plasma source (RPS) enables sophisticated plasma generation and expansion into new thin-film processes not possible with traditional RPS or in-situ plasma generation.

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Self-Contained Plasma Source White Paper

This paper introduces a new remote source technology developed to provide high density plasma generation across a broad range of process conditions.

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Retrofit: Rapid F to Xstream

Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.

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Remote Sensing Application Note

An insight into the different options available for remote sensing the positives and negatives associated to each approach.

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Calibration Sources Overview

The quality of our calibration sources is guaranteed by tests, burn-in times, and pyrometric calibrations.

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.