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Remote Plasma Sources

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Remote Plasma Sources

Remote plasma source solutions from Advanced Energy equip your manufacturing and abatement processes with high functionality and exceptional reliability.

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Xstream

High-Quality, Chamber-Clean Remote Plasma Source with Unrivaled Performance

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Rapid OX

Ideal Remote Plasma Source for Oxygen-Based Processes

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Litmas RPS

Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust Gasses

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Quanta RPS

VHF Remote Plasma Source with Advanced Functionality for Demanding Thin Film Applications

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Rapid OX RPS Data Sheet

Rapid OX is the ideal Remote Plasma Source for Oxygen-Based Processes.

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Xstream RPS Data Sheet

Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.

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Quanta RPS Data Sheet

The Quanta remote plasma source (RPS) enables sophisticated plasma generation and expansion into new thin-film processes not possible with traditional RPS or in-situ plasma generation.

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Litmas RPS Data Sheet

The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases.

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.