Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Retrofit:RFG/RFDS 1250 to Paramount 1250
The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution. With a retrofit of your existing units, Total Cost of Ownership improvements can be realized through reduced tool downtime and improved process and wafer yields.
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Data Sheets
Retrofit: HFV to Paramount Plus MF
Retrofit: Digitally Controlled RF Power Supply with Increased Reliability, Efficiency, and Functionality. AE's Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Data Sheets
Retrofit: Rapid F to Xstream
Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Data Sheets
Retrofit: RFG 5500 to Paramount 5513
Retrofit of your existing RFG 5500 units to the Paramount 5513 for reduced tool downtime, improved process, and wafer yields, and efficiency gains.
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Brochures
Apex 3k5PIN Conversion Brochure
In order to expand the available tuning range of the Apex, a conversion kit was developed to add additional pin diodes to the existing Apex 3k2PIN. By converting to a 3k5PIN, the same Apex unit is now capable of operating in 32 different pin positions, covering a much larger impedance range than before.
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Brochures
RF Calibration Solutions
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
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Brochures
Pyrometer, Thermal Camera, and Blackbody Calibration Solutions
Advanced Energy certified calibration solutions for your precise temperature sensors such as pyrometers, thermal cameras, and blackbodies.
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Brochures
Field Service Quasar Brochure
This document provides an overview of the field calibration verification service offering for the E2T Quasar family.
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