Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Retrofit: HFV to Paramount Plus MF
Retrofit: Digitally Controlled RF Power Supply with Increased Reliability, Efficiency, and Functionality. AE's Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Retrofit: Rapid F to Xstream
Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Retrofit: RF20M to Paramount Plus MF
Retrofit your existing RF20M unit to the Paramount Plus MF for reduced tool downtime, improved process and wafer yields, and efficiency gains.
View ResourceField Service Blackbody Brochure
This document provides an overview of our field calibration service for various models of Mikron Blackbody Sources.
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Factory Calibration Services
We’ve established a fully equipped, expertly staffed laboratory for performing calibrations that meet national standards.
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Retrofit: RFG 5500 to Paramount 5513
Retrofit of your existing RFG 5500 units to the Paramount 5513 for reduced tool downtime, improved process, and wafer yields, and efficiency gains.
View ResourceApex and Paramount RF Generator Comparison
In this application note, we compare our two most popular Advanced Energy 13.56 MHz generators: Apex and Paramount. Learn about the products' key differences and how to select the right one for your specific application.
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