Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Retrofit: HFV to Paramount Plus MF
Retrofit: Digitally Controlled RF Power Supply with Increased Reliability, Efficiency, and Functionality. AE's Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Data Sheets
Retrofit: Rapid F to Xstream
Retrofit: Rapid F to Xstream: Remote Plasma Source with Increased Reliability, Efficiency, and Functionality. The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution.
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Data Sheets
Retrofit: RF20M to Paramount Plus MF
Retrofit your existing RF20M unit to the Paramount Plus MF for reduced tool downtime, improved process and wafer yields, and efficiency gains.
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Field Service Blackbody Brochure
This document provides an overview of our field calibration service for various models of Mikron Blackbody Sources.
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Data Sheets
Factory Calibration Services
We’ve established a fully equipped, expertly staffed laboratory for performing calibrations that meet national standards.
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Data Sheets
Retrofit: RFG 5500 to Paramount 5513
Retrofit of your existing RFG 5500 units to the Paramount 5513 for reduced tool downtime, improved process, and wafer yields, and efficiency gains.
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Apex and Paramount RF Generator Comparison
In this application note, we compare our two most popular Advanced Energy 13.56 MHz generators: Apex and Paramount. Learn about the products' key differences and how to select the right one for your specific application.
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