Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
White Papers
RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminates the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.
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Data Sheets
XRG70 Series Data Sheet
Specifically developed for high-performance, compact x-ray applications, the XRG70 series offers streamlined design and high reliability.
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Data Sheets
Pinnacle Series Data Sheet
Pinnacle DC generators enable quality thin films and maximum process efficiency and are the Most Recognized DC Power Supply for <= 20 kW Processes.
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Application Notes
Interfacing with the High Voltage US Series Application Note
We provide detailed information on connections, pins and leads for the UltraVolt US series.
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Data Sheets
Thyro-A Data Sheet
The Thyro-A SCR power controller delivers flexible application capabilities and industry-proven reliability. It is ideally suited for general heating applications.
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Videos
Major Semiconductor Industry Trends Video
Learn about trends driving the global semiconductor market.
Manuals
CoolX600 Designers Manual
A manual describing the technical details of the CoolX600, a convection-cooled modular power supply.
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White Papers
Raising the Bar on Reactive Deposition Sputter Rates White Paper
Sputtering non-conductive oxides at a high deposition rate for a long period of time has always been a goal for process engineers.
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Webinars
Standard HVPS Advantages Webinar
Learn how standard high voltage power supplies enable you to meet tough timelines and challenging specifications for size, voltage, current, and power.
Data Sheets
Retrofit:RFG/RFDS 1250 to Paramount 1250
The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution. With a retrofit of your existing units, Total Cost of Ownership improvements can be realized through reduced tool downtime and improved process and wafer yields.
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