Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
White Papers
RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminates the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.
View ResourceData Sheets
XRG70 Series Data Sheet
Specifically developed for high-performance, compact x-ray applications, the XRG70 series offers streamlined design and high reliability.
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Pinnacle Series Data Sheet
Pinnacle DC generators enable quality thin films and maximum process efficiency and are the Most Recognized DC Power Supply for <= 20 kW Processes.
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Interfacing with the High Voltage US Series Application Note
We provide detailed information on connections, pins and leads for the UltraVolt US series.
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Thyro-A Data Sheet
The Thyro-A SCR power controller delivers flexible application capabilities and industry-proven reliability. It is ideally suited for general heating applications.
View ResourceVideos
Major Semiconductor Industry Trends Video
Learn about trends driving the global semiconductor market.
Manuals
CoolX600 Designers Manual
A manual describing the technical details of the CoolX600, a convection-cooled modular power supply.
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Raising the Bar on Reactive Deposition Sputter Rates White Paper
Sputtering non-conductive oxides at a high deposition rate for a long period of time has always been a goal for process engineers.
View ResourceWebinars
Standard HVPS Advantages Webinar
Learn how standard high voltage power supplies enable you to meet tough timelines and challenging specifications for size, voltage, current, and power.
Data Sheets
Retrofit:RFG/RFDS 1250 to Paramount 1250
The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution. With a retrofit of your existing units, Total Cost of Ownership improvements can be realized through reduced tool downtime and improved process and wafer yields.
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