White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminates the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.View Resource
Pinnacle Series Data Sheet
Pinnacle DC generators enable quality thin films and maximum process efficiency and are the Most Recognized DC Power Supply for <= 20 kW Processes.View Resource
Thyro-A Data Sheet
The Thyro-A SCR power controller delivers flexible application capabilities and industry-proven reliability. It is ideally suited for general heating applications.View Resource
Raising the Bar on Reactive Deposition Sputter Rates White Paper
Sputtering non-conductive oxides at a high deposition rate for a long period of time has always been a goal for process engineers.View Resource
Standard HVPS Advantages Webinar
Learn how standard high voltage power supplies enable you to meet tough timelines and challenging specifications for size, voltage, current, and power.
Retrofit:RFG/RFDS 1250 to Paramount 1250
The Retrofit Program aims to replace existing, aged AE legacy products with a new drop-in solution. With a retrofit of your existing units, Total Cost of Ownership improvements can be realized through reduced tool downtime and improved process and wafer yields.View Resource