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Showing 831-839 of 839
Data Sheets

Retrofit: 2 MHz, 13.56 MHz and 27.12 MHz RF Generators

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Videos

Chamber Cleaning with Advanced Energy Remote Plasma Sources

In this video, learn how Advanced Energy's MAXstream remote plasma source (RPS) is used in CVD chamber cleaning. Extending AE’s leadership in process power, MAXstream delivers reliable performance across a broad range of flow rates, increasing productivity in semiconductor process equipment.

Data Sheets

WaveCapture FBG Anaylzer Series Data Sheet

The WaveCapture™ Fiber Bragg Grating Interrogation Analyzers (FBGA) are precise, reliable, and compact spectral engine for FBG sensing

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Data Sheets

MAXStream 600, 800, 1000, and 1200 Data Sheet

The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.

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Data Sheets

Trek 157 Data Sheet

The Trek 157 charged plate monitor combines patented precision charge measurement capability with features that drive down ionizer maintenance and performance testing costs.

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Data Sheets

Monroe 288C Data Sheet

The Monroe 288C is the first charged plate monitor to incorporate a microprocessor and data storage, eliminating the need for a dedicated computer.

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Data Sheets

CoolX3000 Data Sheet

The CoolX 3000 series, part of our low voltage solutions, is the smallest modular, configurable, 3000 W power solution in the market.

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Brochures

Precision Optical Temperature & Power Control Brochure

Learn more about our pyrometers and SCR power controllers for temperature-critical environments.

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Software

InfraWin ET Software (1.5 MB .zip)

Software for Advanced Energy's Impac branded pyrometers (Ethernet)

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.