Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Manuals
Impac ISR 12-LO/GS Manual
This manual provides important information about the instrument and can be used as a work of reference for installing, operating, and maintaining your IMPAC pyrometer.
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Application Notes
Improving Ionizer Balance Using External Feedback Sensors Application Note
To limit electrostatic charge accumulation on surfaces where the sensitive devices are processed, every effort is made to ground all surfaces where the ESD-sensitive devices are processed. Learn how an internal feedback system can help the best ionizers limit ion imbalance at the work surface.
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Application Notes
AC-Feedback Electrostatic Voltmeter Operation Application Note
This application note describes the principle of Trek AC-feedback technology.
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Application Notes
Isoprobe® Accuracy Limitations Application Note
An overview of how intense sources in close proximity to the probe aperture can influence the electrostatic field at the sensitive aperture and cause errors.
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Application Notes
Precise Power Control in 3D Device Architectures
Process power plays an essential role enabling complex architectures with atomic-scale features to be formed accurately with minimal defects.
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Certificates
Thermal and Gas Sensing Product Regulatory Matrix
Temperature measurement and gas sensing product regulatory information and summary.
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Software
Trek Infinitron 821HH Installer (148.3 MB .zip)
Windows Installer for the Trek Infinitron 821HH
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