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Process Power Steps Out From the Shadows
Formerly somewhat hidden from view, process power is growing at a rate even faster than the semiconductor equipment industry itself.View Resource
Precise Power Control in 3D Device Architectures
Process power plays an essential role enabling complex architectures with atomic-scale features to be formed accurately with minimal defects.View Resource
Power Supplies for Pulsed Plasma Technologies: State-of-the-Art and Outlook
This paper reviews the development of the plasma power supply and its interaction with the plasma with particular emphasis on pulsed systems for plasma processing.View Resource