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Trek 158A Data Sheet
Charged plate monitor for evaluating the performance of air ionization systems with a compact design for superior data collection and storage capability.View Resource
MAXStream 600, 800, 1000, and 1200 Data Sheet
The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.View Resource
Trek PD06078 Data Sheet
Four-channel electrostatic voltmeter for monitoring critical operations associated with semiconductor, LCD, electronic assembly, and other processes with static charge.View Resource