Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Trek 158A Data Sheet
Charged plate monitor for evaluating the performance of air ionization systems with a compact design for superior data collection and storage capability.
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Data Sheets
MAXStream 600, 800, 1000, and 1200 Data Sheet
The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.
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Data Sheets
Treck 542A Data Sheet
Electrostatic voltmeter for accurate non-contacting measurements of the electrostatic surface voltage associated with EOS/ESD processes.
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Data Sheets
Monroe 282H Data Sheet
Pocket-sized, easy-to-use 200 kV non-contacting static meter which produces consistently accurate readings.
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Data Sheets
Trek PD06078 Data Sheet
Four-channel electrostatic voltmeter for monitoring critical operations associated with semiconductor, LCD, electronic assembly, and other processes with static charge.
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Trek Infinitron 821HH Installer (148.3 MB .zip)
Windows Installer for the Trek Infinitron 821HH
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