Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Paramount HP 10013 Data Sheet
Digitally controlled high impulse RF power delivery systems for higher power applications
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Data Sheets
Monroe 282H Data Sheet
Pocket-sized, easy-to-use 200 kV non-contacting static meter which produces consistently accurate readings.
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Application Notes
CoolX3000 Technical Note
A brief overview of the CoolX3000 and a getting started guide.
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Data Sheets
Monroe 288C Data Sheet
The Monroe 288C is the first charged plate monitor to incorporate a microprocessor and data storage, eliminating the need for a dedicated computer.
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Data Sheets
MAXStream 600, 800, 1000, and 1200 Data Sheet
The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.
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Data Sheets
Trek 157 Data Sheet
The Trek 157 charged plate monitor combines patented precision charge measurement capability with features that drive down ionizer maintenance and performance testing costs.
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Videos
Chamber Cleaning with Advanced Energy Remote Plasma Sources
In this video, learn how Advanced Energy's MAXstream remote plasma source (RPS) is used in CVD chamber cleaning. Extending AE’s leadership in process power, MAXstream delivers reliable performance across a broad range of flow rates, increasing productivity in semiconductor process equipment.
Data Sheets
CoolX3000 Data Sheet
The CoolX 3000 series, part of our low voltage solutions, is the smallest modular, configurable, 3000 W power solution in the market.
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Brochures
Precision Optical Temperature & Power Control Brochure
Learn more about our pyrometers and SCR power controllers for temperature-critical environments.
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Software
InfraWin ET Software (1.5 MB .zip)
Software for Advanced Energy's Impac branded pyrometers (Ethernet)
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