Remote Plasma Sources

MAXstream

Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications

Advanced Energy’s MAXstream line is the next generation of remote plasma sources for chamber cleaning. With flow capabilities of 3 to 12 standard liters per minute (SLPM) and industry-leading power accuracy, MAXstream RPS provides a compact solution for chamber clean, and with AE’s proven RPS reliability, long life trouble-free operation.

  • Highly reliable plasma cleaning systems for trouble-free operation
  • Proprietary high-purity aluminum substrate with Type 3 anodization for longer chamber life
  • Unique dual ignition core design ensures virtually 100% ignition reliability
  • Industry-leading 2% power accuracy for consistent, repeatable performance
  • Overview
  • Technical Specs
  • Documents
  • Service & Support
  • Distributors

Overview

Advanced Energy’s MAXstreamTM line is the next generation of remote plasma sources for chamber cleaning. The MAXstream is available in 3, 6, 8, 10, and 12 SLPM NF3 flow rates to optimize price and performance and offers up to 60 percent improvement in power accuracy over traditionally used systems.

Ensuring long chamber life and low particle generation, AE brings its proven and differentiated plasma source materials and technology. The unique dual ignition core design delivers best-in-class plasma ignition reliability. Featuring a reliable and strike-every-time ignition, MAXstream RPS offers more consistent operation and less downtime for RPS maintenance.

The MAXstream RPS facilitates drop-in compatibility with traditional RPS systems, simplifying design-in compatibility as well as enabling seamless field upgrades to a new reliable and repeatable solution.

Benefits

  • Enable customers to optimize cost via multiple flow options
  • Save valuable tool space with a smaller footprint than Xstream RPS
  • Achieve virtually 100% ignition reliability with unique AE dual ignition cores
  • Increase chamber life with AE proprietary high purity aluminum substrate with Type 3 anodization
  • Reduce cleaning time with up to 12 SLPM flow capabilities

Features

  • Five models: MAXstream 300 for low flow applications and MAXstream 600, 800, 1000, 1200 for higher flow applications
  • Highly reliable RPS maximizes tool uptime
  • Drop-in capability with traditional RPS units for an easy design upgrade path to higher performance and reliability
  • Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion
  • Active monitoring and control of plasma power for industry-leading power accuracy
  • Plasma Power Range

    300 to 12,000 W, continuous

  • Ignition

    MAXstream 300

    100 mTorr to 4 Torr up to 2 SLM of Ar, <1% poisoned by NF3

    MAXstream 600, 800, 1000, 1200

    100 mTorr to 4 Torr of Argon up to 1 SLPM

  • Power Accuracy

    ±2% or 15 W, whichever is greater

  • Flow Range

    MAXstream 300

    Up to 3 SLPM at 10 Torr

    MAXstream 600, 800, 1000, 1200

    Up to 12 SLM at 30 Torr

  • Input Voltage

    MAXstream 300

    187 to 229 VAC, no neutral, 3 phase with PE ground (phase insensitive)

    MAXstream 600, 800, 1000, 1200

    200 to 208 VAC ±10% (180 to 229 VAC), no neutral, 3 phase with PE ground (phase insensitive)

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546


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Compare Products

Model

MAXstream Remote Plasma Source

MAXstream 300

MAXstream Remote Plasma Source

MAXStream 600, 800, 1000, 1200

Plasma Power Range

300 to 6000 W

500 to 12,000 W

Power Accuracy

±2% or 15 W, whichever is greater

±2% or 15 W, whichever is greater

Flow Rate

Up to 3 SLPM at 10 Torr

Up to 12 SLPM at 30 Torr

Ignition

100 mTorr to 4 Torr up to 2 SLPM

100 mTorr to 4 Torr of Argon up to 1 SLPM

H x W x D

25.4 x 21 x 42.4 cm (10 x 8.3 x 16.7 in)

26.3 x 24.1 x 43.4 cm (10.3 x 9.5 x 17.1 in)

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