RF Plasma Generators

Transform Your Process Innovation

Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.

RF Plasma Generators

Apex

High-Power Density for Compact Installation

Cesar

Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

HiLight

A Compact, Economical, Easy to Install, Low Power RF Platform

LFGS

Economical, Mid-Frequency Generator Tailored for Plasma Processing

Paramount

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Paramount Plus

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

PDX

Proven, Mid-Frequency Workhorse with Industry-Leading Reliability

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