Plasma Power Generators

Pinnacle Plus+

Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films

Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.

  • Charge clearing during the reverse pulse prevents arcs from developing
  • Adjustable process through frequency and duty cycle control
  • Compact air-cooled design expandable in primary/secondary configurations
  • Overview
  • Technical Specs
  • Service & Support

Overview

Advanced Energy Pinnacle® Plus+ power supplies provide all the advantages of a pulsed-DC solution for reactive processes — in an easily integrated package that increases process efficiency, reduces costs, and offers superior flexibility and latitude. Combining standard DC technology and our patented pulsed-DC technology, the Pinnacle Plus+ power supplies provide higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions.

Benefits

  • Higher deposition and yield rates 
  • Superior film uniformity and quality 
  • Reduced substrate damage caused by arcing 
  • Excellent process flexibility and latitude 
  • Repeatable performance 

Features

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 
  • Superior arc control  
  • Dual output available for multi-chamber production 
  • Power

    Single Output

    1.5 kW HALO (high accuracy, low output), 5 kW (single- and dual-output models), 10 kW 

    Dual Output

    5/5 kW, independently controlled 

  • Voltage

    Up to 800 VDC in a single, wide voltage range (no taps) 

  • Frequency

    Adjustable from 0 Hz (DC) to 350 kHz

  • Repeatability

    +/- 0.1% of rated power

  • Accuracy

    +/- 1% of setpoint or +/- 0.2% of full rated power (whichever is greater)

  • Communication Interfaces

    Analog, RS-232/485, Profibus

  • AC Input

    208, 400, and 480 VAC models available

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.