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Pinnacle III Plus+ Pulsed DC Power Supply
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films
- Charge clearing during the reverse pulse prevents arcs from developing
- Adjustable process through frequency and duty cycle control
- Compact air-cooled design expandable in main/satellite configurations
特点
- Adjustable frequency range of 5 to 350 kHz
- Variable duty cycle up to 45%
- Wide voltage range — single-tap wide impedance range
- Superior arc management
- Dual output available for multi-chamber production
益处
- Higher deposition and yield rates
- Superior film uniformity and quality
- Reduced substrate damage caused by arcing
- Excellent process flexibility and latitude
- Repeatable performance
规格
| 冷却: | Air |
|---|---|
| 输出频率（兆赫、千赫）: | 5 to 350 kHz |
| 输入电压 (V): | 208, 400, 440, 480 VAC |
| 功率等级（千瓦）: | 1.5 to 10 kW |
| 机架宽度: | Full rack |
| 高度（英寸）: | 3U |
| 输出电压范围 (V): | 325-800 V |
| 通信接口: | Ethernet, EtherCAT, DeviceNet, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
技术文档
服务
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
Conversion
Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
Refurbishments
Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
