Ascent DMS Pulsed and DC Power System
Advanced Dual-Magnetron Sputtering Accessories
Features
- Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
- Selectable frequency (500 Hz to 50 kHz)
- Adjustable duty cycle — independent power ratio regulation for each magnetron
- Advanced process management through a tiered approach to arc mitigation
- CEX (phase synchronization)
Benefits
- Increased film value: Repeatable, customizable deposited films
- Lower cost of ownership and increased productivity
- Higher power levels with improved stability and reduced arc damage
- Easy scalability, integration, and support
- Modular design allows you to pay for only what you need while enabling future capability expansion
Specifications
Cooling: | Hybrid (air and water) |
---|---|
Output Frequency (MHz, kHz): | 0.5 to 50 kHz |
Input Voltage (V): | 100 to 240 VAC |
Power Level (kW): | 40 to 120 kW |
Rack Width: | Full rack |
Height (Inches): | 6U, 10U |
Output Voltage Range (V): | 400-1000 V |
Communications Interface: | Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
Featured Resources

Ascent® DMS Brochure
The Ascent® DMS series offers unprecedented power delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics.

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