Ascent DMS | Advanced Energy
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Ascent DMS


Advanced Dual-Magnetron Sputtering Accessories

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation.  The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits. 


  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron
  • Advanced process management through a tiered approach to arc mitigation
  • CEX (phase synchronization)


  • Increased film value: Repeatable, customizable deposited films
  • Lower cost of ownership and increased productivity
  • Higher power levels with improved stability and reduced arc damage
  • Easy scalability, integration, and support
  • Modular design allows you to pay for only what you need while enabling future capability expansion


Kühlung: Hybrid (air and water)
Ausgangsfrequenz (MHz, kHz): 0.5 to 50 kHz
Eingangsspannung (V): 100 to 240 VAC
Leistungsstufe (kW): 40 to 120 kW
Rack Breite: Full rack
Höhe (Zoll): 6U, 10U
Ausgangsspannungsbereich (V): 400-1000 V
Kommunikationsschnittstelle: Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

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