High Voltage Products
EG353 Series
35 kV High Voltage Power Supply for Scanning Electron Microscopes
The EG353 series meets the demanding multiple output requirements of SEM, and applications including inspection, material and biological sciences, and forensics.
- Max Output Power: Accelerator: 6 W; Extractor: 4 W; Suppressor: 0.1 W; Heater: 15 W
- Max Output Voltage: Up to - 30 kV (Accelerator)
- Ripple: < 2 ppm (50 mVpp) (Accelerator); Floating Suppressor (-1 kV); Extractor (+10 kV); Filament (3 A)
- Temperature Coefficient: < 25 ppm°C (Accelerator)
- Control Interface: Digital
- Overview
- Technical Specs
- Documents
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Overview
Advanced Energy’s EG353 series offers dependable, high-stability power supplies for scanning electron microscopes (SEM) with built-in flexibility to accommodate various Schottky emission electron gun configurations. The EG353 series includes Advanced Energy’s Direct Drive Digital Control (D3C) which enables a smaller footprint and improves MTBF and reliability. Via a proven design and power-conversion technologies, EG353 power supplies can help maximize image quality and repeatability.
Benefits
- Enable better efficiency, more consistent operation, low variance-to-component change, greater reliability, and easier testing
- Easily install with flexible module and rack-mount options
- Customize with standard and specialized accessories
- Minimize setup and configuration times with Direct Drive Digital Control (D3C) technology
Features
- Low ripple (< 1.6 ppm, accelerator) and high stability (< 10 ppm, accelerator) for resolutions to 1 nm
- Market-leading reliability and performance enabled by Advanced Energy’s Direct Drive Digital Control (D3C) technology
- Choice of mechanical format — small-footprint module or 19-inch rack-mounted unit
- Customer-defined derivatives and connection options available upon request
- Easy-to-use digital control and monitoring; additional grounded outputs can be added
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Electrical
Output Power
Accelerator: 6 W
Extractor: 4 W
Suppressor: 0.1 W
Heater: 15 WOutput Voltage
Accelerator: -30 kV 200 µA
Extractor: +10 kV 400 µA
Suppressor: -1 kV 100 µA
Heater: 5 V 3 AVoltage Ripple
Accelerator: < 2 ppm (50 mVpp)
Extractor: < 2 ppm (20 mVpp)
Suppressor: < 30 ppm (30 mVpp)
Heater: < 1 mA pp/5 mVpp with a 1 Ω loadTemperature Coefficient
Accelerator: < 25 ppm/°C
Extractor: < 25 ppm/°C
Suppressor: < 20 ppm/°C -
Environmental
Operating Temperature Range
10 to 45°C (50 to 113°F)
Storage Temperature Range
-20 to +70°C (-4 to 158°F)
Humidity
80% max RH up to 31°C, reducing linearly to 50% at 40°C (140°F)
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Mechanical
Module Dimensions
240 x 130 x 332 mm (9.4 x 5.1 x 13 in3) (W x H x D)
Module Weight
10.2 kg (22.5 lb)
Rack-Mount Unit Dimensions
440 x 132.6 x 345 mm (17.3 x 5.2 x 13.5 in3) (W x H x D)
Rack-Mount Weight
12 kg (26.5 lb)
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Interface
Input Connector
2-way PTR/Phoenix STLZ950/2-G-5.08-green (pin 1 positive, pin 2 negative)
HV Output Connectors
Heater: 2 wires of customer 4-way HV connector
Suppressor: 1 wire of customer 4-way HV connector
Extractor: 1 wire of customer 4-way HV connector -
Options and Accessories
Supply Connectors
- Standard EG353 4-point connector
- Claymount CA12 connector
- Installation Type: Compact module
- 19-inch rack-mounted unit
Accessories
- HV Output Cables with EG353 connectors and SEM column connectors — 1 m, 3 m, or 5 m
- Add serial to optical interface
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
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