Patent Marking
*Disclaimer - This list is a non-exclusive list. Other Advanced Energy patents could apply to Advanced Energy products.
Likewise, other Advanced Energy products may utilize other Advanced Energy patents.
| Patent No. | Issued Patents | Products |
| 6,156,667 | Methods and Apparatus for Plasma Processing | Litmas® |
| 6,291,938 | Methods and Apparatus for Igniting and Sustaining Inductively Coupled Plasma | Litmas® |
| 6,392,210 | Methods and Apparatus for RF Power Process Operations with Automatic Input Power Control | Litmas® |
| 6,617,679 | Semiconductor Package for Multiple High Power Transistors | Stealth FET, Apex®, Paramount® |
| 6,661,324 | Voltage and Current Sensor | Navigator® (selected versions) |
| 6,697,265 | Wide Range DC Power Supply Utilizing Voltage Doubling Output Capacitors and Inductive Choke to Extend Full Power Load Impedance Range | Pinnacle® (selected versions), Diamond, X-Arc |
| 6,724,148 | Mechanism for Minimizing Ion Bombardment Energy in a Plasma Chamber | Xstream |
| 6,791,274 | RF Power Control Device for RF Plasma Applications | Ovation |
| 6,888,313 | Impedance Matching Network with Termination of Secondary RF Frequencies | Navigator® (selected versions) |
| 6,979,980 | Soft Switching Interleaved Power Converter | Summit®, Solaron® |
| 7,049,751 | Termination of Secondary Frequencies in RF Power Delivery | Navigator® (selected versions) |
| 7,157,857 | Stabilizing Plasma and Generator Interactions | Apex®, Paramount® |
| 7,305,311 | Arc Detection and Handling in Radio Frequency Power Applications | Apex®, Paramount® |
| 7,445,695 | Method and System for Conditioning a Vapor Deposition Target | Ascent® and Summit® |
| 7,498,908 | High Power PIN Diode Switch | Navigator® (selected versions) |
| 7,547,005 | System and Method for Delivering Vapor | Water Delivery System |
| 7,761,247 | Arc Detection and Handling in Radio Frequency Power Applications | Apex®, Paramount® |
| 7,822,565 | System, Method and Apparatus for Monitoring Characteristics of RF Power | Paramount®, PDX II, Lynx, Navigator® (selected versions) |
| 7,825,719 | System and Method for Wideband Phase-Adjustable Common Excitation | Paramount® |
| 7,839,223 | Method and Apparatus for Advanced Frequency Tuning | Paramount® (selected versions) |
| 8,044,594 | Power Supply Ignition System and Method | Crystal® |
| 8,093,884 | Directional Coupler | Paramount® VHF |
| 8,111,531 | Interleaved Soft Switching Bridge Power Converter | Ascent® Summit® and Solaron® |
| 8,133,359 | Methods and Apparatus for Sputtering Deposition Using Direct Current | Ascent® DMS |
| 8,134,812 | Energy Conversion System with Fault Detection and Interruption | 250NX, 333NX, 500NX formerly Solaron® |
| 8,203,069 | System, Method and Apparatus for Coupling Photovoltaic Arrays | Solaron® |
| 8,217,299 | Arc Recovery Without Overvoltage for Plasma Chamber Power Supplies using a Shunt Switch | Ascent® |
| 8,258,874 | Dual Mode Control of a Power Generator | Paramount® |
| 8,319,436 | Passive Power Distribution for Multiple Electrode Inductive Plasma Source | Navigator® (selected versions) |
| 8,395,078 | Arc Recovery with Over Voltage Protection for Plasma Chamber Power Supplies | Ascent® (selected versions) |
| 8,416,008 | Impedance Matching Network Using BJT Switches in Variable-Reactance Circuits | Navigator® (selected versions) |
| 8,552,665 | Proactive Arc Management of a Plasma Load | Ascent® |
| 8,716,984 | Method and Apparatus for Modifying the Sensitivity of an Electrical Generator to a Nonlinear Load | Paramount® (selected versions) |
| 8,723,423 | Electrostatic Remote Plasma Source | Quanta® |
| 8,742,669 | Passive Power Distribution for Multiple Electrode Inductive Plasma Source | Navigator® (selected versions) |
| 8,742,939 | Aspirating Particle Sensor for Smoke Detection within an Electronics Enclosure | Paramount® (selected versions) |
| 8,815,329 | Delivered Energy Compensation During Plasma Processing | Ascent® (selected versions) |
| 8,884,180 | Over Voltage Protection during Arc-Recovery for Plasma Chamber Power Supplies | Ascent® (selected versions) |
| 9,105,447 | Wide Dynamic Range Ion Energy Bias Control; Fast Ion Energy Switching; Ion Energy Control and a Pulsed Bias Supply; and a Virtual Front Panel | eVoSTM |
| 9,142,388 | Capacitively Coupled Remote Plasma Source | Quanta® |
| 9,208,992 | Method for Controlling Ion Energy Distribution | eVoSTM |
| 9,210,790 | Systems and Methods for Calibrating a Switched Mode Ion Energy Distribution System | eVoSTM |
| 9,224,579 | Adjustable Non Dissipative Voltage Boosting Snubber Network for Achieving Large Boost Voltages | Ascent® (selected versions), Ascent® DMS, DMS AP, SMS AP |
| 9,225,299 | Variable Class Amplifier System and Method | Paramount® (selected versions) |
| 9,226,380 | Adjustable Non-Dissipative Voltage Boosting Snubber Network | Ascent® DMS, DMS AP, SMS AP |
| 9,287,086 | System, Method and Apparatus for Controlling Ion Energy Distribution | eVoSTM |
| 9,287,092 | Method and Apparatus for Controlling Ion Energy Distribution | eVoSTM |
| 9,294,100 | Frequency Tuning System and Method for Finding a Global Optimum | Paramount® (selected versions) |
| 9,313,870 | Arc Management with Voltage Reversal and Improved Recovery | Ascent® (selected versions) |
| 9,362,089 | Method of Controlling the Switched Mode Ion Energy Distribution System | eVoSTM |
| 9,483,066 | Adjustable Non-Dissipative Voltage Boosting Snubber Network | Ascent® (selected versions) |
| 9,524,854 | Electrostatic Remote Plasma Source System and Method | Quanta® |
| 9,536,713 | Reliable Plasma Ignition and Reignition | Paramount® |
| 9,558,917 | Adjustable Non-Dissipative Voltage Boosting Snubber Network for Achieving Large Boost Voltages | Ascent® (selected versions) |
| 9,577,516 | Apparatus for Controlled Overshoot in an RF Generator | Paramount® (selected versions) |
| 9,685,297 | Systems and Methods for Monitoring Faults, Anomalies, and Other Characteristics of a Switched Mode Ion Energy Distribution System | eVoSTM |
| 9,711,331 | Frequency Tuning for Pulsed Radio Frequency Plasma Processing | Paramount® and Paramount Plus® (selected versions) |
| 9,748,076 | Apparatus for Frequency Tuning in an RF Generator | Paramount® and Paramount Plus® (selected versions) |
| 9,767,988 | Method of Controlling the Switched Mode Ion Energy Distribution System | eVoSTM |
| 10,026,595 | Apparatus for Frequency Tuning in an RF Generator | Paramount® and Paramount Plus® |
| 10,224,186 | Plasma Source Device and Methods | Quanta® |
| 10,225,919 | Projected Plasma Source | Quanta® |
| 10,332,730 | Method for Balancing Consumption of Targets in Pulsed Dual Magnetron Sputtering (DMS) Processes | Ascent® (selected versions) |
| 10,373,811 | Systems and Methods for Single Magnetron Sputtering | Ascent® |
| *Disclaimer - This list is a non-exclusive list. Other Advanced Energy patents could apply to Advanced Energy products. Likewise, other Advanced Energy products may utilize other Advanced Energy patents. |
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