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Paramount HFi RF Power Delivery System
Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System
The Paramount® HFi is an integrated RF delivery solution for deposition and other semiconductor plasma-based processes. An electrically switchable solid-state capacitor array is physically integrated with the RF power amplifier providing the most compact form-factor power delivery system available. With an overall package size nearly equal to that of a traditional RF power generator, this design also includes the matching network within the common enclosure. The matching network, with 32 tune range positions, allows for reliable RF power delivery across a wide range of impedances.
In addition to a reduced footprint, mechanically driven vacuum capacitors are replaced in the integrated matching network with solid state components for increased reliability and repeatability—crucial attributes in high-cycle, repetitive processes. By eliminating the traditional stand-alone vacuum capacitor matching network, very fast tuning and direct power regulation are achieved, reducing latency in today’s short-cycle, high step-count deposition processes.
特徴
- 32 tune range positions with millisecond switching speeds to enable the shortest process steps
- Controllable tune range positions optimize the impedance range to customer process
- Water-cooled with no requirements for external air exchange
- Common exciter (CEX) mode to sync multiple systems in cluster configurations
- RS-232, Ethernet, and EtherCAT communication
メリット
- Utilize faster tuning speeds to enables stable performance even in the shortest process steps
- Decrease costs with integrated package configuration when compared to separate generator and matching network
- Free up valuable real estate on multi-wafer chamber deposition systems with reduced footprint
仕様
| 冷却: | Water |
|---|---|
| 出力周波数（MHz、kHz）: | 13.56 MHz |
| 入力電圧 (V): | 208 VAC |
| 出力レベル（kW）: | 3 kW |
| ラック幅: | N/A, chamber mounted |
| 通信インターフェース: | RS-232, 25-pin analog, Ethernet, EtherCAT |
| 高度な機能: | CEX |
| プロセスアプリケーション: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
技術文書
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Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
